Inventor · disambiguated record
Herbert Vonach
Also filed as: VONACH HERBERT
10 granted patents·325 citations·filing 1993–2006
91Inventor score
Files withIMS IONEN MIKROFAB SYST4IMS INNENMIKROFABRIKATIONS SYS1IMS IONEN MIKROFABRATIONS SYST1IMS IONEN MIKROPFABRIKATIONS S1IMS MIKROFABRIKATIONS SYSTEME1
Top patents by PatentIndex Score
10 records- 0197US6768125B2Maskless particle-beam system for exposing a pattern on a substrateIMS NANOFABRICATION GMBH·Filed 2003·Granted Jul 27, 2004·186 cites·21 claims
- 0279US6989546B2Particle multibeam lithographyIMS INNENMIKROFABRIKATIONS SYS·Filed 1999·Granted Jan 24, 2006·40 cites·29 claims
- 0363US5742062AArrangement for masked beam lithography by means of electrically charged particlesIMS MIKROFABRIKATIONS SYSTEME·Filed 1996·Granted Apr 21, 1998·20 cites·40 claims
- 0461US8049189B2Charged particle systemZEISS CARL SMS GMBH·Filed 2006·Granted Nov 1, 2011·1 cites·19 claims
- 0560US5801388AParticle beam, in particular ionic optic imaging systemIMS IONEN MIKROPFABRIKATIONS S·Filed 1995·Granted Sep 1, 1998·17 cites·11 claims
- 0660US5378917AParticle-beam imaging systemIMS IONEN MIKROFABRATIONS SYST·Filed 1993·Granted Jan 3, 1995·17 cites·15 claims
- 0759US5876880AProcess for producing a structured maskIMS IONEN MIKROFAB SYST·Filed 1995·Granted Mar 2, 1999·19 cites·29 claims
- 0853US5436460AIon-optical imaging systemIMS IONEN MIKROFAB SYST·Filed 1993·Granted Jul 25, 1995·11 cites·10 claims
- 0950US5874739AArrangement for shadow-casting lithographyIMS IONEN MIKROFAB SYST·Filed 1997·Granted Feb 23, 1999·9 cites·12 claims
- 1041US5693950AProjection system for charged particlesIMS IONEN MIKROFAB SYST·Filed 1995·Granted Dec 2, 1997·5 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →