Inventor · disambiguated record
Engelbertus Antonius Fransiscus Van Der Pasch
Also filed as: VAN DER PASCH ENGELBERTUS ANTO · VAN DER PASCH ENGELBERTUS ANTONIUS · VAN DER PASCH ENGELBERTUS ANTONIUS FRANCISCUS · VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS
90 granted patents·4 pending applications·1,181 citations·filing 2003–2024
99Inventor score
Files withASML NETHERLANDS BV61BUTLER HANS4VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS4STEIJAERT PETER PAUL3VAN EIJK JAN3
Top patents by PatentIndex Score
94 records- 0199US7362446B2Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unitASML NETHERLANDS BV·Filed 2005·Granted Apr 22, 2008·164 cites·19 claims
- 0298US7636165B2Displacement measurement systems lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 22, 2009·104 cites·43 claims
- 0398US7602489B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Oct 13, 2009·117 cites·18 claims
- 0498US7483120B2Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·121 cites·23 claims
- 0598US7348574B2Position measurement system and lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Mar 25, 2008·138 cites·22 claims
- 0698US7253875B1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 7, 2007·166 cites·21 claims
- 0797US10712667B2Optical device and associated systemASML NETHERLANDS BV·Filed 2017·Granted Jul 14, 2020·22 cites·10 claims
- 0897US7515281B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Apr 7, 2009·35 cites·23 claims
- 0996US7619207B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Nov 17, 2009·88 cites·19 claims
- 1094US10466599B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Nov 5, 2019·4 cites·20 claims
- 1194US8319940B2Position measurement system and lithographic apparatusBUTLER HANS·Filed 2008·Granted Nov 27, 2012·18 cites·22 claims
- 1294US7903866B2Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable objectASML NETHERLANDS BV·Filed 2007·Granted Mar 8, 2011·16 cites·33 claims
- 1393US11262661B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 1, 2022·4 cites·18 claims
- 1493US8988650B2Lithographic apparatus and device manufacturing methodWESTERLAKEN JAN STEVEN CHRISTIAAN·Filed 2011·Granted Mar 24, 2015·13 cites·20 claims
- 1590US11287242B2Cyclic error measurements and calibration procedures in interferometersASML NETHERLANDS BV·Filed 2017·Granted Mar 29, 2022·7 cites·20 claims
- 1690US8570492B2Lithographic apparatusVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2012·Granted Oct 29, 2013·6 cites·20 claims
- 1789US11940739B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 26, 2024·1 cites·19 claims
- 1889US9696638B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jul 4, 2017·3 cites·18 claims
- 1989US9529277B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Dec 27, 2016·3 cites·20 claims
- 2089US9470988B2Substrate positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Oct 18, 2016·10 cites·15 claims
- 2187US10209634B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 19, 2019·3 cites·20 claims
- 2287US8482719B2Positioning system, lithographic apparatus and methodVAN EIJK JAN·Filed 2010·Granted Jul 9, 2013·6 cites·16 claims
- 2386US8903156B2Method of updating calibration data and a device manufacturing methodVAN DE MAST FRANCISCUS·Filed 2011·Granted Dec 2, 2014·12 cites·20 claims
- 2485US11914308B2Lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 2584US11719529B2Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Aug 8, 2023·2 cites·15 claims
- 2684US7230676B1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jun 12, 2007·7 cites·13 claims
- 2783US10976675B2Lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Apr 13, 2021·1 cites·21 claims
- 2881US7119886B2Lithographic apparatus, device manufacturing method, and angular encoderASML NETHERLANDS BV·Filed 2004·Granted Oct 10, 2006·19 cites·21 claims
- 2981US2025028259A1Imprint Apparatus with Movable StagesASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 3080US9268211B2Lithographic apparatus, and patterning device for use in a lithographic processASML NETHERLANDS BV·Filed 2013·Granted Feb 23, 2016·2 cites·14 claims
- 3179US10908508B2Position measurement of optical elements in a lithographic apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Feb 2, 2021·1 cites·21 claims
- 3279US7599043B2Position measurement system and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Oct 6, 2009·4 cites·20 claims
- 3378US10509325B2Position measurement of optical elements in a lithographic apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Dec 17, 2019·1 cites·21 claims
- 3477US11609503B2Lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 21, 2023·0 cites·20 claims
- 3576US8174671B2Lithographic projection apparatus and method for controlling a support structureLOOPSTRA ERIK ROELOF·Filed 2008·Granted May 8, 2012·4 cites·38 claims
- 3675US7557903B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jul 7, 2009·4 cites·8 claims
- 3774US8730485B2Lithographic apparatus and device manufacturing methodVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2010·Granted May 20, 2014·3 cites·14 claims
- 3874US8446567B2Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage systemBUTLER HANS·Filed 2009·Granted May 21, 2013·3 cites·19 claims
- 3974US7265366B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 4, 2007·12 cites·32 claims
- 4073US8390820B2Displacement measurement system having a prism, for displacement measurement between two or more gratingsKLAVER RENATUS GERARDUS·Filed 2009·Granted Mar 5, 2013·4 cites·17 claims
- 4173US8264671B2Lithographic apparatus and device manufacturing methodAARTS IGOR MATHEUS PETRONELLA·Filed 2009·Granted Sep 11, 2012·5 cites·14 claims
- 4272US10444635B2Lithographic method and apparatusASML NETHERLANDS BV·Filed 2017·Granted Oct 15, 2019·1 cites·15 claims
- 4372US7999912B2Lithographic apparatus and sensor calibration methodASML NETHERLANDS BV·Filed 2007·Granted Aug 16, 2011·7 cites·25 claims
- 4472US2023324164A1Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 4570US8451454B2Stage system, lithographic apparatus including such stage system, and correction methodKOENEN WILLEM HERMAN GERTRUDA ANNA·Filed 2008·Granted May 28, 2013·3 cites·16 claims
- 4669US10571815B2Lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Feb 25, 2020·0 cites·20 claims
- 4769US9329501B2Lithographic apparatus, method of deforming a substrate table and device manufacturing methodHUANG YANG-SHAN·Filed 2012·Granted May 3, 2016·2 cites·19 claims
- 4869US8687166B2Lithographic apparatus having an encoder position sensor systemSTEIJAERT PETER PAUL·Filed 2007·Granted Apr 1, 2014·3 cites·20 claims
- 4968US9977348B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2015·Granted May 22, 2018·1 cites·20 claims
- 5068US8368868B2Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactlessASML NETHERLANDS BV·Filed 2009·Granted Feb 5, 2013·2 cites·14 claims
Showing the top 50 of 94 patent records by PatentIndex Score.
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