Inventor · disambiguated record
Romain Sappey
Also filed as: SAPPEY ROMAIN
7 granted patents·1 pending application·40 citations·filing 2005–2016
82Inventor score
Top patents by PatentIndex Score
8 records- 0189US9772289B2System and method for defect detection and photoluminescence measurement of a sampleKLA TENCOR CORP·Filed 2016·Granted Sep 26, 2017·5 cites·50 claims
- 0282US7554654B2Surface characteristic analysisKLA TENCOR CORP·Filed 2007·Granted Jun 30, 2009·12 cites·2 claims
- 0381US7847954B2Measuring the shape and thickness variation of a wafer with high slopesKLA TENCOR CORP·Filed 2008·Granted Dec 7, 2010·13 cites·24 claims
- 0480US9410890B2Methods and apparatus for spectral luminescence measurementKLA TENCOR CORP·Filed 2013·Granted Aug 9, 2016·4 cites·14 claims
- 0574US9354177B2System and method for defect detection and photoluminescence measurement of a sampleKLA TENCOR CORP·Filed 2014·Granted May 31, 2016·2 cites·62 claims
- 0674US8736831B2Substrate inspectionRAMACHANDRAN MAHENDRA PRABHU·Filed 2012·Granted May 27, 2014·4 cites·26 claims
- 0746US7505143B2Dynamic reference plane compensationKLA TENCOR CORP·Filed 2005·Granted Mar 17, 2009·0 cites·17 claims
- 0835US2006256345A1Interferometry measurement in disturbed environmentsKLA TENCOR TECH CORP·Filed 2005·Application pending·0 cites
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