Inventor · disambiguated record
Huayong Hu
Also filed as: HU HUAYONG
12 granted patents·38 citations·filing 2012–2017
85Inventor score
Files withSEMICONDUCTOR MFG INT SHANGHAI CORP9HU HUAYONG1SEMICONDUCTOR MFG INT BEIJING CORP1SEMICONDUCTOR MFG INT SHANGHAI1
Top patents by PatentIndex Score
12 records- 0197US9711529B23D NAND device and fabrication method thereofSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2016·Granted Jul 18, 2017·32 cites·15 claims
- 0275US9645499B2Photoresist with top-coating photo-decomposable base for photolithographySEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted May 9, 2017·1 cites·15 claims
- 0371US10763275B23D NAND deviceSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2017·Granted Sep 1, 2020·1 cites·10 claims
- 0466US10204809B2Method for thermal treatment using heat reservoir chamberSEMICONDUCTOR MFG INT BEIJING CORP·Filed 2017·Granted Feb 12, 2019·1 cites·18 claims
- 0564US10427185B2Patterning methodSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2016·Granted Oct 1, 2019·0 cites·18 claims
- 0663US9298099B2Exposure apparatus and exposure method thereofSEMICONDUCTOR MFG INT SHANGHAI·Filed 2013·Granted Mar 29, 2016·1 cites·20 claims
- 0758US9547236B2Patterning apparatus and patterning methods thereofSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2014·Granted Jan 17, 2017·0 cites·15 claims
- 0858US8563201B2Mask, manufacturing method thereof and mask haze monitoring methodHU HUAYONG·Filed 2012·Granted Oct 22, 2013·2 cites·20 claims
- 0954US10105722B2Photoresist coating apparatus and methodsSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2014·Granted Oct 23, 2018·0 cites·19 claims
- 1049US9606451B2Exposure apparatus, photolithographical reticles and exposure methods thereofSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2014·Granted Mar 28, 2017·0 cites·16 claims
- 1144US9576828B2Heat reservoir chamber, and method for thermal treatmentSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted Feb 21, 2017·0 cites·17 claims
- 1231US9640446B2Semiconductor structure and fabrication method thereofSEMICONDUCTOR MFG INT SHANGHAI CORP·Filed 2015·Granted May 2, 2017·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →