Inventor · disambiguated record
Bryan K. Choo
Also filed as: CHOO BRYAN · CHOO BRYAN K
35 granted patents·721 citations·filing 1997–2012
98Inventor score
Top patents by PatentIndex Score
35 records- 0195US7080330B1Concurrent measurement of critical dimension and overlay in semiconductor manufacturingADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 18, 2006·79 cites·25 claims
- 0292US6566655B1Multi-beam SEM for sidewall imagingADVANCED MICRO DEVICES INC·Filed 2000·Granted May 20, 2003·44 cites·41 claims
- 0390US6459482B1Grainless material for calibration sampleADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 1, 2002·32 cites·22 claims
- 0489US6451512B1UV-enhanced silylation process to increase etch resistance of ultra thin resistsADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 17, 2002·36 cites·19 claims
- 0587US6884999B1Use of scanning probe microscope for defect detection and repairADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 26, 2005·39 cites·21 claims
- 0687US6354133B1Use of carbon nanotubes to calibrate conventional tips used in AFMADVANCED MICRO DEVICES INC·Filed 2000·Granted Mar 12, 2002·66 cites·20 claims
- 0786US6829380B1Optimization of OPC design factors utilizing an advanced algorithm on a low voltage CD-SEM systemADVANCED MICRO DEVICES INC·Filed 2000·Granted Dec 7, 2004·26 cites·11 claims
- 0886US6591658B1Carbon nanotubes as linewidth standards for SEM & AFMADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 15, 2003·61 cites·35 claims
- 0986US6516528B1System and method to determine line edge roughness and/or linewidthADVANCED MICRO DEVICES INC·Filed 2001·Granted Feb 11, 2003·34 cites·19 claims
- 1082US6507474B1Using localized ionizer to reduce electrostatic charge from wafer and maskADVANCED MICRO DEVICES INC·Filed 2000·Granted Jan 14, 2003·21 cites·18 claims
- 1180US6319643B1Conductive photoresist pattern for long term calibration of scanning electron microscopeADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 20, 2001·17 cites·20 claims
- 1279US6479820B1Electrostatic charge reduction of photoresist pattern on development trackADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 12, 2002·17 cites·23 claims
- 1377US6396059B1Using a crystallographic etched silicon sample to measure and control the electron beam width of a SEMADVANCED MICRO DEVICES INC·Filed 2000·Granted May 28, 2002·13 cites·29 claims
- 1477US6190062B1Cleaning chamber built into SEM for plasma or gaseous phase cleaningADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 20, 2001·12 cites·22 claims
- 1575US6635874B1Self-cleaning technique for contamination on calibration sample in SEMADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 21, 2003·11 cites·25 claims
- 1675US6437329B1Use of carbon nanotubes as chemical sensors by incorporation of fluorescent molecules within the tubeADVANCED MICRO DEVICES INC·Filed 1999·Granted Aug 20, 2002·65 cites·22 claims
- 1774US6634805B1Parallel plate developmentADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 21, 2003·16 cites·18 claims
- 1873US7173648B1System and method for visually monitoring a semiconductor processing systemADVANCED MICRO DEVICES INC·Filed 2000·Granted Feb 6, 2007·10 cites·23 claims
- 1972US7468296B1Thin film germanium diode with low reverse breakdownSPANSION LLC·Filed 2005·Granted Dec 23, 2008·4 cites·18 claims
- 2072US6559446B1System and method for measuring dimensions of a feature having a re-entrant profileADVANCED MICRO DEVICES INC·Filed 2000·Granted May 6, 2003·9 cites·22 claims
- 2169US6572252B1System and method for illuminating a semiconductor processing systemADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 3, 2003·12 cites·14 claims
- 2269US6373053B1Analysis of CD-SEM signal to detect scummed/closed contact holes and linesADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 16, 2002·12 cites·21 claims
- 2365US6912438B2Using scatterometry to obtain measurements of in circuit structuresADVANCED MICRO DEVICES INC·Filed 2002·Granted Jun 28, 2005·9 cites·25 claims
- 2465US6452161B1Scanning probe microscope having optical fiber spaced from point of hpADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 17, 2002·13 cites·20 claims
- 2563US6462343B1System and method of providing improved CD-SEM pattern recognition of structures with variable contrastADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 8, 2002·10 cites·11 claims
- 2661US6632283B1System and method for illuminating a semiconductor processing systemADVANCED MICRO DEVICES INC·Filed 2000·Granted Oct 14, 2003·7 cites·6 claims
- 2760US6479817B1Cantilever assembly and scanning tip therefor with associated optical sensorADVANCED MICRO DEVICES INC·Filed 2000·Granted Nov 12, 2002·10 cites·32 claims
- 2859US6423479B1Cleaning carbon contamination on mask using gaseous phaseADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 23, 2002·5 cites·20 claims
- 2957US8089113B2Damascene metal-insulator-metal (MIM) devicePANGRLE SUZETTE K·Filed 2006·Granted Jan 3, 2012·1 cites·20 claims
- 3054US6455847B1Carbon nanotube probes in atomic force microscope to detect partially open/closed contactsADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 24, 2002·11 cites·21 claims
- 3152US6371134B2Ozone cleaning of wafersADVANCED MICRO DEVICES INC·Filed 2000·Granted Apr 16, 2002·3 cites·18 claims
- 3248US8232175B2Damascene metal-insulator-metal (MIM) device with improved scaleabilityPANGRLE SUZETTE K·Filed 2006·Granted Jul 31, 2012·0 cites·11 claims
- 3348US6444381B1Electron beam flood exposure technique to reduce the carbon contaminationADVANCED MICRO DEVICES INC·Filed 2000·Granted Sep 3, 2002·7 cites·22 claims
- 3445US9343666B2Damascene metal-insulator-metal (MIM) device with improved scaleabilityPANGRLE SUZETTE K·Filed 2012·Granted May 17, 2016·0 cites·14 claims
- 3545US5977542ARestoration of CD fidelity by dissipating electrostatic chargeFiled 1997·Granted Nov 2, 1999·9 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →