Inventor · disambiguated record
Tomoyuki Matsuyama
Also filed as: MATSUYAMA TOMOYUKI
30 granted patents·15 pending applications·415 citations·filing 1996–2024
97Inventor score
Top patents by PatentIndex Score
45 records- 0198US7423731B2Illumination optical system, exposure apparatus, and exposure method with polarized switching deviceNIKON CORP·Filed 2005·Granted Sep 9, 2008·59 cites·58 claims
- 0297US7515248B2Illumination optical system, exposure apparatus, and exposure method with polarized state detection result and adjustmentNIKON CORP·Filed 2007·Granted Apr 7, 2009·25 cites·28 claims
- 0395US9140990B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2011·Granted Sep 22, 2015·8 cites·9 claims
- 0494US7230682B2Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage mediumNIKON CORP·Filed 2004·Granted Jun 12, 2007·49 cites·16 claims
- 0592US9423694B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Aug 23, 2016·4 cites·34 claims
- 0691US8365107B2Scanner based optical proximity correction system and method of useNIKON CORP·Filed 2008·Granted Jan 29, 2013·10 cites·28 claims
- 0791US7405803B2Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage mediumNIKON CORP·Filed 2007·Granted Jul 29, 2008·10 cites·28 claims
- 0891US6198576B1Projection optical system and exposure apparatusNIKON CORP·Filed 1998·Granted Mar 6, 2001·89 cites·21 claims
- 0989US9286416B2Scanner based optical proximity correction system and method of useNIKON CORP·Filed 2012·Granted Mar 15, 2016·4 cites·23 claims
- 1086US11854288B2Image determining device to determine the state of a subjectNIKON CORP·Filed 2021·Granted Dec 26, 2023·1 cites·11 claims
- 1186US6639651B2Fabrication method for correcting member, fabrication method for projection optical system, and exposure apparatusNIKON CORP·Filed 2001·Granted Oct 28, 2003·26 cites·53 claims
- 1284US9753363B2Scanner based optical proximity correction system and method of useNIKON CORP·Filed 2016·Granted Sep 5, 2017·3 cites·22 claims
- 1383US5852490AProjection exposure method and apparatusNIKON CORP·Filed 1996·Granted Dec 22, 1998·44 cites·12 claims
- 1482US10338480B2Lithography system, simulation apparatus, and pattern forming methodNIKON CORP·Filed 2015·Granted Jul 2, 2019·2 cites·52 claims
- 1582US10234756B2Scanner based optical proximity correction system and method of useNIKON CORP·Filed 2017·Granted Mar 19, 2019·2 cites·12 claims
- 1682US2025095398A1Image determining device to determine the state of a subjectNIKON CORP·Filed 2024·Application pending·0 cites
- 1782US2024078831A1An image determining device to determine the state of a subjectNIKON CORP·Filed 2023·Application pending·0 cites
- 1878US10255491B2Guidance system, detection device, and position assessment deviceSEKIGUCHI MASAKAZU·Filed 2011·Granted Apr 9, 2019·12 cites·13 claims
- 1976US6166865AProjection optical system and exposure apparatusNIKON CORP·Filed 1999·Granted Dec 26, 2000·35 cites·19 claims
- 2075US7515247B2Illumination optical system, exposure apparatus, and exposure method with polarized state fluctuation correcting deviceNIKON CORP·Filed 2007·Granted Apr 7, 2009·2 cites·30 claims
- 2174US9551938B2Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation methodMATSUYAMA TOMOYUKI·Filed 2012·Granted Jan 24, 2017·3 cites·38 claims
- 2268US11055522B2Image determining device to determine the state of a subjectNIKON CORP·Filed 2019·Granted Jul 6, 2021·0 cites·10 claims
- 2365US2018341185A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2018·Application pending·0 cites
- 2464US9047751B2Image determining device to determine the state of a subjectYAMAMOTO TETSUYA·Filed 2010·Granted Jun 2, 2015·1 cites·25 claims
- 2563US10846457B2Lithography system, simulation apparatus, and pattern forming methodNIKON CORP·Filed 2019·Granted Nov 24, 2020·0 cites·48 claims
- 2663US10275645B2Image determining device to determine the state of a subjectNIKON CORP·Filed 2017·Granted Apr 30, 2019·0 cites·11 claims
- 2763US10007194B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2008·Granted Jun 26, 2018·1 cites·7 claims
- 2863US2019163050A1Scanner based optical proximity correction system and method of useNIKON CORP·Filed 2019·Application pending·0 cites
- 2962US2017227854A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2017·Application pending·0 cites
- 3061US5920379AProjection exposure method and apparatusNIKON CORP·Filed 1998·Granted Jul 6, 1999·17 cites·10 claims
- 3160US10241417B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Mar 26, 2019·0 cites·32 claims
- 3260US10234770B2Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Mar 19, 2019·0 cites·33 claims
- 3358US2008239274A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2008·Application pending·0 cites
- 3458US2012236285A1Illumination optical system, exposure apparatus, and exposure methodTANITSU OSAMU·Filed 2012·Application pending·0 cites
- 3556US7391497B2Image forming state adjusting system, exposure method and exposure apparatus, and program and information storage mediumNIKON CORP·Filed 2007·Granted Jun 24, 2008·0 cites·21 claims
- 3656US7102728B2Imaging optical system evaluation method, imaging optical system adjustment method, exposure apparatus and exposure methodNIKON CORP·Filed 2003·Granted Sep 5, 2006·4 cites·37 claims
- 3755US2009316132A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2009·Application pending·0 cites
- 3854US2010225895A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2010·Application pending·0 cites
- 3954US2010149511A1Illumination optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2010·Application pending·0 cites
- 4053US2015235077A1Image determining device to determine the state of a subjectNIKON CORP·Filed 2015·Application pending·0 cites
- 4150US8174456B2Control system and method for reducing directional error of antenna with biaxial gimbal structureOMORI GO·Filed 2008·Granted May 8, 2012·4 cites·12 claims
- 4250US2006170901A1Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2006·Application pending·0 cites
- 4340US2013321625A1Electronic device and information transmission systemYANAGIHARA MASAMITSU·Filed 2012·Application pending·0 cites
- 4436US2004042094A1Projection optical system and production method therefor, exposure system and production method therefor, and production method for microdeviceFiled 2001·Application pending·0 cites
- 4536US2002171815A1Method for manufacturing exposure apparatus and method for manufacturing micro deviceNIKON CORP·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →