Inventor · disambiguated record
Xiafang Zhang
Also filed as: ZHANG XIAFANG · ZHANG XIAFANG MICHELLE
8 granted patents·59 citations·filing 2004–2010
84Inventor score
Top patents by PatentIndex Score
8 records- 0188US7525304B1Measurement of effective capacitanceKLA TENCOR CORP·Filed 2007·Granted Apr 28, 2009·18 cites·25 claims
- 0285US8004290B1Method and apparatus for determining dielectric layer propertiesKLA TENCOR CORP·Filed 2008·Granted Aug 23, 2011·12 cites·35 claims
- 0380US7075318B1Methods for imperfect insulating film electrical thickness/capacitance measurementKLA TENCOR TECH CORP·Filed 2004·Granted Jul 11, 2006·20 cites·17 claims
- 0460US7724003B1Substrate conditioning for corona charge controlKLA TENCOR CORP·Filed 2007·Granted May 25, 2010·2 cites·20 claims
- 0560US7098050B1Corona based charge voltage measurementKLA TENCOR TECH CORP·Filed 2004·Granted Aug 29, 2006·6 cites·19 claims
- 0651US7397254B1Methods for imperfect insulating film electrical thickness/capacitance measurementKLA TENCOR TECH CORP·Filed 2006·Granted Jul 8, 2008·1 cites·19 claims
- 0750US7345306B1Corona based charge voltage measurementKLA TENCOR TECH CORP·Filed 2006·Granted Mar 18, 2008·0 cites·8 claims
- 0834US9239522B2Method of determining an asymmetric property of a structureSHIH MENG-FU·Filed 2010·Granted Jan 19, 2016·0 cites·16 claims
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