Inventor · disambiguated record
Peter L. Filosi
Also filed as: FILOSI PETER L
3 granted patents·16 citations·filing 2001–2006
66Inventor score
Technology areasG03F
Files withASML HOLDING NV3
Top patents by PatentIndex Score
3 records- 0175US6859260B2Method and system for improving focus accuracy in a lithography systemASML HOLDING NV·Filed 2001·Granted Feb 22, 2005·12 cites·51 claims
- 0274US7053984B2Method and systems for improving focus accuracy in a lithography systemASML HOLDING NV·Filed 2005·Granted May 30, 2006·3 cites·17 claims
- 0363US7248336B2Method and system for improving focus accuracy in a lithography systemASML HOLDING NV·Filed 2006·Granted Jul 24, 2007·1 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Peter L. Filosi files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →