Inventor · disambiguated record
Douglas E. Benoit
Also filed as: BENOIT DOUGLAS E · BENOIT DOUGLAS EARL
5 granted patents·56 citations·filing 1994–2001
80Inventor score
Files withIBM5
Top patents by PatentIndex Score
5 records- 0178US6521383B2Pattern density tailoring for etching of advanced lithographic masksIBM·Filed 2001·Granted Feb 18, 2003·15 cites·16 claims
- 0262US6365326B1Pattern density tailoring for etching of advanced lithographic maskIBM·Filed 1999·Granted Apr 2, 2002·19 cites·20 claims
- 0358US5716763ALiquid immersion heating process for substrate temperature uniformityIBM·Filed 1994·Granted Feb 10, 1998·15 cites·27 claims
- 0434US6039858APlating process for x-ray mask fabricationIBM·Filed 1998·Granted Mar 21, 2000·4 cites·4 claims
- 0532US6287434B1Plating cell apparatus for x-ray mask fabricationIBM·Filed 1999·Granted Sep 11, 2001·3 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →