Inventor · disambiguated record
Manabu Saeda
Also filed as: SAEDA MANABU
2 granted patents·15 citations·filing 1994–2012
51Inventor score
Top patents by PatentIndex Score
2 records- 0146US5421902ANon-plasma cleaning method for semiconductor manufacturing apparatusIWATANI & CO·Filed 1994·Granted Jun 6, 1995·15 cites·2 claims
- 0231US9416445B2Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluorideYOSHINO YU·Filed 2012·Granted Aug 16, 2016·0 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →