Inventor · disambiguated record
Marc Estoque
Also filed as: ESTOQUE MARC
4 granted patents·1 pending application·176 citations·filing 2016–2020
81Inventor score
Technology areasH10P
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0197US9881820B2Front opening ring podLAM RES CORP·Filed 2016·Granted Jan 30, 2018·124 cites·29 claims
- 0296US10062589B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·20 cites·19 claims
- 0396US10062590B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·23 cites·19 claims
- 0491US10541168B2Edge ring centering method using ring dynamic alignment dataLAM RES CORP·Filed 2017·Granted Jan 21, 2020·9 cites·19 claims
- 0542US2023369025A1High precision edge ring centering for substrate processing systemsLAM RES CORP·Filed 2020·Application pending·0 cites
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