Inventor · disambiguated record
Michael Berger
Also filed as: BERGER MICHAEL · BERGER MICHAEL GOETZ
9 granted patents·223 citations·filing 1994–2000
89Inventor score
Top patents by PatentIndex Score
9 records- 0182US5874047AChemical sensors, in particular silicon-based biosensorsFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1995·Granted Feb 23, 1999·73 cites·11 claims
- 0277US6130748AChemical sensor based on porous siliconFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1997·Granted Oct 10, 2000·49 cites·20 claims
- 0375US5696629AOptical component comprising layers of porous siliconFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1994·Granted Dec 9, 1997·41 cites·4 claims
- 0454US6398943B1Process for producing a porous layer by an electrochemical etching processFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1998·Granted Jun 4, 2002·19 cites·5 claims
- 0548US6255709B1Color-selective SI detector arrayFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1997·Granted Jul 3, 2001·12 cites·1 claims
- 0644US6413408B1Method for the production of a porous layerFORSCHUNGSZENTRUM JUELIEH GMBH·Filed 1999·Granted Jul 2, 2002·16 cites·6 claims
- 0739US6632699B1Process for making a color selective Si detector arrayFORSCHUNGSZENTRUM JUELICH GMBH·Filed 2000·Granted Oct 14, 2003·0 cites·8 claims
- 0838US5831329ALayered system with an electrically activatable layerFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1994·Granted Nov 3, 1998·8 cites·6 claims
- 0931US5935410AProcess and device for the lighting-supported structuring of porous siliconFORSCHUNGSZENTRUM JUELICH GMBH·Filed 1997·Granted Aug 10, 1999·5 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →