Inventor · disambiguated record
Steven Berger
Also filed as: BERGER STEVEN · BERGER STEVEN D · BERGER STEVEN DAVID · MUSIL CHRISTIAN R
19 granted patents·513 citations·filing 1989–2015
96Inventor score
Files withAT & T BELL LAB6FEI CO6LUCENT TECHNOLOGIES INC3AT & T CORP2BIERHOFF MARTINUS PETRUS MARIA2
Top patents by PatentIndex Score
19 records- 0192US7906762B2Compact scanning electron microscopeFEI CO·Filed 2007·Granted Mar 15, 2011·25 cites·16 claims
- 0292US5079112ADevice manufacture involving lithographic processingAT & T BELL LAB·Filed 1989·Granted Jan 7, 1992·78 cites·3 claims
- 0391US8309921B2Compact scanning electron microscopeBIERHOFF MARTINUS PETRUS MARIA·Filed 2011·Granted Nov 13, 2012·17 cites·7 claims
- 0490US5130213ADevice manufacture involving lithographic processingAT & T BELL LAB·Filed 1990·Granted Jul 14, 1992·64 cites·63 claims
- 0586US7662524B2Photolithography mask repairFEI CO·Filed 2008·Granted Feb 16, 2010·14 cites·14 claims
- 0684US7504182B2Photolithography mask repairFEI CO·Filed 2003·Granted Mar 17, 2009·35 cites·14 claims
- 0783US5260151ADevice manufacture involving step-and-scan delineationAT & T BELL LAB·Filed 1991·Granted Nov 9, 1993·100 cites·17 claims
- 0883US5258246ADevice manufacture involving lithographic processingAT & T BELL LAB·Filed 1992·Granted Nov 2, 1993·44 cites·39 claims
- 0980US9865427B2User interface for an electron microscopeFEI CO·Filed 2015·Granted Jan 9, 2018·2 cites·16 claims
- 1074US5279925AProjection electron lithographic procedureAT & T BELL LAB·Filed 1992·Granted Jan 18, 1994·28 cites·9 claims
- 1173US7917349B2Combined hardware and software instrument simulator for use as a teaching aidFEI CO·Filed 2006·Granted Mar 29, 2011·2 cites·25 claims
- 1271US5701014AProjection lithography apparatusLUCENT TECHNOLOGIES INC·Filed 1996·Granted Dec 23, 1997·27 cites·5 claims
- 1370US9025018B2User interface for an electron microscopeBIERHOFF MARTINUS PETRUS MARIA·Filed 2007·Granted May 5, 2015·2 cites·21 claims
- 1466US7727681B2Electron beam processing for mask repairFEI CO·Filed 2004·Granted Jun 1, 2010·9 cites·14 claims
- 1561US5382498AProcesses for electron lithographyAT & T CORP·Filed 1992·Granted Jan 17, 1995·14 cites·5 claims
- 1659US5376505ADevice fabrication entailing submicron imagingAT & T CORP·Filed 1992·Granted Dec 27, 1994·14 cites·12 claims
- 1754US5561008AProcess for device fabrication using projection lithography and an apparatus thereforLUCENT TECHNOLOGIES INC·Filed 1995·Granted Oct 1, 1996·13 cites·5 claims
- 1850US5316879ASub-micron device fabrication using multiple aperture filterAT & T BELL LAB·Filed 1992·Granted May 31, 1994·20 cites·16 claims
- 1942USRE36964EDevice manufacture involving lithographic processingLUCENT TECHNOLOGIES INC·Filed 1994·Granted Nov 21, 2000·5 cites·51 claims
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