Inventor · disambiguated record
Ming-Chih Yeh
Also filed as: YEH MING-CHIH
3 granted patents·2 pending applications·5 citations·filing 2014–2024
57Inventor score
Top patents by PatentIndex Score
5 records- 0174US9752057B2CMP method for suppression of titanium nitride and titanium/titanium nitride removalCABOT MICROELECTRONICS CORP·Filed 2015·Granted Sep 5, 2017·3 cites·8 claims
- 0267US9803109B2CMP composition for silicon nitride removalCABOT MICROELECTRONICS CORP·Filed 2015·Granted Oct 31, 2017·2 cites·21 claims
- 0360US12338369B2Nitride inhibitors for high selectivity of TiN—SiN CMP applicationsCMC MAT LLC·Filed 2024·Granted Jun 24, 2025·0 cites·13 claims
- 0445US2016053381A1Germanium chemical mechanical polishingCABOT MICROELECTRONICS CORP·Filed 2014·Application pending·0 cites
- 0541US2019085205A1NITRIDE INHIBITORS FOR HIGH SELECTIVITY OF TiN-SiN CMP APPLICATIONSCABOT MICROELECTRONICS CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →