Inventor · disambiguated record
Fuminori Asa
Also filed as: ASA FUMINORI
4 granted patents·1 pending application·42 citations·filing 2002–2011
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0175US6712579B2Substrate transfer apparatus and substrate transfer methodDAINIPPON SCREEN MFG·Filed 2002·Granted Mar 30, 2004·23 cites·15 claims
- 0266US7596425B2Substrate detecting apparatus and method, substrate transporting apparatus and method, and substrate processing apparatus and methodDAINIPPON SCREEN MFG·Filed 2004·Granted Sep 29, 2009·14 cites·10 claims
- 0364US8423173B2Load port apparatus, lid member mounting and dismounting apparatus for load port apparatus, and controlling method for lifting mechanisms of mapping apparatusSUZUKI KENSUKE·Filed 2010·Granted Apr 16, 2013·3 cites·12 claims
- 0461US8540473B2Load portASA FUMINORI·Filed 2011·Granted Sep 24, 2013·2 cites·7 claims
- 0535US2005028928A1Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2004·Application pending·0 cites
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