Inventor · disambiguated record
Yoshinori Miwa
Also filed as: MIWA YOSHINORI
17 granted patents·1 pending application·111 citations·filing 1998–2006
93Inventor score
Top patents by PatentIndex Score
18 records- 0184US7265812B2Cooling apparatusCANON KK·Filed 2006·Granted Sep 4, 2007·5 cites·15 claims
- 0284US6829038B2Exposure apparatus and exposure methodCANON KK·Filed 2001·Granted Dec 7, 2004·18 cites·27 claims
- 0378US6829034B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2001·Granted Dec 7, 2004·16 cites·51 claims
- 0476US7145632B2Cooling apparatusCANON KK·Filed 2005·Granted Dec 5, 2006·3 cites·12 claims
- 0566US7586582B2Exposure apparatusCANON KK·Filed 2006·Granted Sep 8, 2009·2 cites·3 claims
- 0666US6552774B2Exposure apparatusCANON KK·Filed 2000·Granted Apr 22, 2003·8 cites·25 claims
- 0762US6982841B2Mirror holding mechanism in exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Jan 3, 2006·5 cites·25 claims
- 0862US6522384B2Exposure method and apparatus, and device manufacturing methodCANON KK·Filed 1999·Granted Feb 18, 2003·17 cites·23 claims
- 0959US6259509B1Exposure apparatus and device manufacturing methodCANON KK·Filed 1999·Granted Jul 10, 2001·18 cites·24 claims
- 1045US6493066B1Exposure apparatusCANON KK·Filed 1999·Granted Dec 10, 2002·9 cites·9 claims
- 1145US2006072219A1Mirror holding mechanism in exposure apparatus, and device manufacturing methodKINO YOSHIKI·Filed 2005·Application pending·0 cites
- 1244US7095480B2Cooling apparatusCANON KK·Filed 2004·Granted Aug 22, 2006·0 cites·1 claims
- 1344US7009684B2Exposure apparatus and exposure methodCANON KK·Filed 2004·Granted Mar 7, 2006·0 cites·10 claims
- 1443US7435984B2Imaging optical system and exposure apparatusCANON KK·Filed 2006·Granted Oct 14, 2008·0 cites·10 claims
- 1542US6762822B2Exposure apparatus and manufacturing method using the sameCANON KK·Filed 2003·Granted Jul 13, 2004·0 cites·11 claims
- 1641US6791662B2Exposure method and apparatus, and device manufacturing methodCANON KK·Filed 2002·Granted Sep 14, 2004·0 cites·11 claims
- 1740US6590631B2Exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1999·Granted Jul 8, 2003·5 cites·29 claims
- 1830US6278516B1Projection exposure apparatus and method of producing a device using a projection exposure apparatusCANON KK·Filed 1998·Granted Aug 21, 2001·5 cites·30 claims
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