Inventor · disambiguated record
Yoshiyuki Tomita
Also filed as: TOMITA YOSHIYUKI
15 granted patents·1 pending application·245 citations·filing 1989–2013
93Inventor score
Files withSUMITOMO HEAVY INDUSTRIES13SUMIMOTO HEAVY IND LTD1SUPER SILICON CRYSTAL RES INST1TIPTON CORP1
Top patents by PatentIndex Score
16 records- 0194US7257902B2Stage deviceSUMITOMO HEAVY INDUSTRIES·Filed 2006·Granted Aug 21, 2007·46 cites·6 claims
- 0284US6817104B2X-Y stage apparatusSUMITOMO HEAVY INDUSTRIES·Filed 2002·Granted Nov 16, 2004·26 cites·6 claims
- 0382US6584367B1Stage position control method and stage position control apparatus capable of improving positioning precisionSUMITOMO HEAVY INDUSTRIES·Filed 2000·Granted Jun 24, 2003·36 cites·7 claims
- 0482US6564110B1Position controlling apparatus capable of reducing the effect of disturbanceSUMITOMO HEAVY INDUSTRIES·Filed 2000·Granted May 13, 2003·36 cites·2 claims
- 0579US6668202B2Position control system and velocity control system for stage driving mechanismSUMITOMO HEAVY INDUSTRIES·Filed 2001·Granted Dec 23, 2003·26 cites·14 claims
- 0674US7502127B2Sensor device and stage deviceSUMITOMO HEAVY INDUSTRIES·Filed 2006·Granted Mar 10, 2009·4 cites·9 claims
- 0769US7239939B2Substrate transfer deviceSUMITOMO HEAVY INDUSTRIES·Filed 2005·Granted Jul 3, 2007·3 cites·41 claims
- 0867US9283647B2Centrifugal barrel polishing machine and centrifugal barrel polishing methodTIPTON CORP·Filed 2013·Granted Mar 15, 2016·1 cites·5 claims
- 0964US7082674B2Method for winding a single coil of a coil unit for a linear motorSUMITOMO HEAVY INDUSTRIES·Filed 2003·Granted Aug 1, 2006·11 cites·1 claims
- 1062US6925355B2Substrate transfer deviceSUMITOMO HEAVY INDUSTRIES·Filed 2002·Granted Aug 2, 2005·8 cites·10 claims
- 1153US5056030AApparatus for carrying out decoupling control of a t-dieSUMITOMO HEAVY INDUSTRIES·Filed 1989·Granted Oct 8, 1991·16 cites·4 claims
- 1253US4990078AStructure of lip drive portion of T-dieSUMIMOTO HEAVY IND LTD·Filed 1989·Granted Feb 5, 1991·13 cites·5 claims
- 1351US6644584B2Single coil of coil unit for linear motor, method and device for winding and forming the same, and method for forming and fabricating coil unitSUMITOMO HEAVY INDUSTRIES·Filed 2002·Granted Nov 11, 2003·4 cites·7 claims
- 1447US6165054ADouble side grinding apparatus and double side polishing apparatusSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Dec 26, 2000·15 cites·8 claims
- 1534US6965115B2Airtight processing apparatus, airtight processing method, and electron beam processing apparatusSUMITOMO HEAVY INDUSTRIES·Filed 2004·Granted Nov 15, 2005·0 cites·14 claims
- 1631US2010270476A1Reaction force treatment mechanism, xy stage apparatus, inspection apparatusSUMITOMO HEAVY INDUSTRIES·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →