Inventor · disambiguated record
Stephen D. Senturia
Also filed as: SENTURIA STEPHEN D
33 granted patents·3 pending applications·3,073 citations·filing 1977–2006
98Inventor score
Top patents by PatentIndex Score
36 records- 0197US5757536AElectrically-programmable diffraction gratingSANDIA CORP·Filed 1995·Granted May 26, 1998·261 cites·32 claims
- 0297US5043043AMethod for fabricating side drive electrostatic micromotorMASSACHUSETTS INST TECHNOLOGY·Filed 1990·Granted Aug 27, 1991·141 cites·7 claims
- 0397US4943750AElectrostatic micromotorMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Jul 24, 1990·146 cites·27 claims
- 0496US6392313B1MicroturbomachineryMASSACHUSETTS INST TECHNOLOGY·Filed 1999·Granted May 21, 2002·207 cites·20 claims
- 0596US6329738B1Precision electrostatic actuation and positioningMASSACHUSETTS INST TECHNOLOGY·Filed 2000·Granted Dec 11, 2001·143 cites·37 claims
- 0696US5932940AMicroturbomachineryMASSACHUSETTS INST TECHNOLOGY·Filed 1996·Granted Aug 3, 1999·287 cites·70 claims
- 0796US5106461AHigh-density, multi-level interconnects, flex circuits, and tape for tabMASSACHUSETTS INST TECHNOLOGY·Filed 1990·Granted Apr 21, 1992·480 cites·4 claims
- 0896US4423371AMethods and apparatus for microdielectrometryMASSACHUSETTS INST TECHNOLOGY·Filed 1981·Granted Dec 27, 1983·119 cites·2 claims
- 0995US5905571AOptical apparatus for forming correlation spectrometers and optical processorsSANDIA CORP·Filed 1995·Granted May 18, 1999·235 cites·40 claims
- 1094US4997521AElectrostatic micromotorMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Mar 5, 1991·97 cites·5 claims
- 1193US4896098ATurbulent shear force microsensorMASSACHUSETTS INST TECHNOLOGY·Filed 1988·Granted Jan 23, 1990·99 cites·54 claims
- 1293US4158807AGapped gate charge-flow transistor with a thin film sensor having two modes of conduction within the gapped gate used to sense a property of the ambient environmentMASSACHUSETTS INST TECHNOLOGY·Filed 1977·Granted Jun 19, 1979·56 cites·100 claims
- 1392US4980034AHigh-density, multi-level interconnects, flex circuits, and tape for TABMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Dec 25, 1990·122 cites·24 claims
- 1491US5955659AElectrostatically-actuated structures for fluid property measurements and related methodsMASSACHUSETTS INST TECHNOLOGY·Filed 1998·Granted Sep 21, 1999·81 cites·78 claims
- 1589US7505641B1Optical biosensor incorporating wavelength encoding of multiple unlabeled analytesPOLYCHROMIX CORP·Filed 2006·Granted Mar 17, 2009·20 cites·28 claims
- 1689US7196789B2Light processor providing wavelength control and method for samePOLYCHROMIX CORP·Filed 2004·Granted Mar 27, 2007·42 cites·150 claims
- 1787US4899581AMethod and apparatus for the quantitative measurement of adhesion of thin filmsMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Feb 13, 1990·61 cites·15 claims
- 1887US4823607AReleased film structures and method of measuring film propertiesMASSACHUSETTS INST TECHNOLOGY·Filed 1987·Granted Apr 25, 1989·56 cites·17 claims
- 1985US5378330AMethod for polishing micro-sized structuresPANASONIC TECHNOLOGIES INC·Filed 1993·Granted Jan 3, 1995·46 cites·20 claims
- 2082US4926696AOptical micropressure transducerMASSACHUSETTS INST TECHNOLOGY·Filed 1986·Granted May 22, 1990·80 cites·32 claims
- 2181US4236121AOscillators including charge-flow transistor logic elementsMASSACHUSETTS INST TECHNOLOGY·Filed 1978·Granted Nov 25, 1980·24 cites·48 claims
- 2276US4942767APressure transducer apparatusMASSACHUSETTS INST TECHNOLOGY·Filed 1989·Granted Jul 24, 1990·59 cites·6 claims
- 2376US4352059ADetermination of moisture level in materialsMASSACHUSETTS INST TECHNOLOGY·Filed 1980·Granted Sep 28, 1982·30 cites·19 claims
- 2475US4614119AResonant hollow beam and methodFOXBORO CO·Filed 1985·Granted Sep 30, 1986·44 cites·54 claims
- 2573US6664706B1Electrostatically-controllable diffraction gratingMASSACHUSETTS INST TECHNOLOGY·Filed 2001·Granted Dec 16, 2003·25 cites·22 claims
- 2672US5834627ACalorimetric gas sensorSANDIA CORP·Filed 1996·Granted Nov 10, 1998·39 cites·11 claims
- 2770US4368480AMultiplexing of chemically responsive FETsMASSACHUSETTS INST TECHNOLOGY·Filed 1979·Granted Jan 11, 1983·15 cites·3 claims
- 2867US6724125B2Methods and apparatus for diffractive optical processing using an actuatable structureMASSACHUSETTS INST TECHNOLOGY·Filed 2002·Granted Apr 20, 2004·11 cites·17 claims
- 2963US7046410B2Actuatable diffractive optical processorPOLYCHROMIX INC·Filed 2001·Granted May 16, 2006·11 cites·30 claims
- 3060US4908509ATraction and reaction force microsensorMASSACHUSETTS INST TECHNOLOGY·Filed 1988·Granted Mar 13, 1990·18 cites·52 claims
- 3151US4317084AOscillator that includes a charge-flow transistorMASSACHUSETTS INST TECHNOLOGY·Filed 1979·Granted Feb 23, 1982·9 cites·14 claims
- 3250US4209796ACharge-flow transistors having metallization patternsMASSACHUSETTS INST TECHNOLOGY·Filed 1977·Granted Jun 24, 1980·7 cites·45 claims
- 3341US2002167695A1Methods and apparatus for diffractive optical processing using an actuatable structureFiled 2002·Application pending·0 cites
- 3438US2005002677A1Methods and apparatus for monitoring the strength of carriers in an optical communication systemPOLYCHROMIX INC·Filed 2003·Application pending·0 cites
- 3535US4316140ACharge-flow transistorsMASSACHUSETTS INST TECHNOLOGY·Filed 1979·Granted Feb 16, 1982·2 cites·10 claims
- 3633US2002191913A1Apparatus and method for processing lightHONEYWELL INT INC·Filed 2001·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Stephen D. Senturia files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →