Inventor · disambiguated record
Fumihiko Higuchi
Also filed as: HIGUCHI FUMIHIKO
7 granted patents·3 pending applications·161 citations·filing 1992–2007
86Inventor score
Top patents by PatentIndex Score
10 records- 0189US8251011B2Plasma processing apparatusYAMAZAWA YOHEI·Filed 2007·Granted Aug 28, 2012·13 cites·19 claims
- 0280US7527016B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2003·Granted May 5, 2009·16 cites·11 claims
- 0378US5411631ADry etching methodTOKYO ELECTRON LTD·Filed 1993·Granted May 2, 1995·66 cites·22 claims
- 0461US5554249AMagnetron plasma processing systemTOKYO ELECTRON LTD·Filed 1995·Granted Sep 10, 1996·30 cites·20 claims
- 0552US5560804AEtching method for silicon containing layerTOKYO ELECTRON LTD·Filed 1995·Granted Oct 1, 1996·19 cites·19 claims
- 0646US5314573ADry etching polysilicon using a bromine-containing gasTOKYO ELECTRON LTD·Filed 1992·Granted May 24, 1994·17 cites·10 claims
- 0738US2005227494A1Processing system and method for treating a substrateTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0836US2005014372A1Etching method and plasma etching processing apparatusFiled 2004·Application pending·0 cites
- 0934US2005106868A1Etching methodFiled 2003·Application pending·0 cites
- 1033US7192532B2Dry etching methodTOKYO ELECTRON LTD·Filed 2002·Granted Mar 20, 2007·0 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Fumihiko Higuchi files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →