Inventor · disambiguated record
Geoffrey O'Connor
Also filed as: O'CONNOR GEOFFREY
6 granted patents·133 citations·filing 1986–2016
82Inventor score
Top patents by PatentIndex Score
6 records- 0190US10324383B2Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted Jun 18, 2019·5 cites·24 claims
- 0284US5285142AWafer stage with reference surfaceSVG LITHOGRAPHY SYSTEMS INC·Filed 1993·Granted Feb 8, 1994·92 cites·11 claims
- 0380US7678458B2Bonding silicon silicon carbide to glass ceramicsASML HOLDING NV·Filed 2007·Granted Mar 16, 2010·6 cites·13 claims
- 0468US8168017B2Bonding silicon silicon carbide to glass ceramicsLIPSON MATTHEW·Filed 2010·Granted May 1, 2012·2 cites·3 claims
- 0559US4760429AHigh speed reticle change systemPERKIN ELMER CORP·Filed 1986·Granted Jul 26, 1988·28 cites·3 claims
- 0650USRE49066EChucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatusASML HOLDING NV·Filed 2016·Granted May 10, 2022·0 cites·50 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →