Inventor · disambiguated record
Mohammad Mehdi Daneshpanah
Also filed as: DANESHPANAH MOHAMMAD M · DANESHPANAH MOHAMMAD MEHDI
6 granted patents·2 pending applications·46 citations·filing 2011–2018
79Inventor score
Top patents by PatentIndex Score
8 records- 0191US8340456B1System and method for depth from defocus imagingDANESHPANAH MOHAMMAD MEHDI·Filed 2011·Granted Dec 25, 2012·28 cites·24 claims
- 0290US10395361B2Apparatus and methods for inspecting reticlesKLA TENCOR CORP·Filed 2017·Granted Aug 27, 2019·4 cites·26 claims
- 0390US8737756B2System and method for depth from defocus imagingGEN ELECTRIC·Filed 2012·Granted May 27, 2014·10 cites·17 claims
- 0470US9311700B2Model-based registration and critical dimension metrologyKLA TENCOR CORP·Filed 2013·Granted Apr 12, 2016·3 cites·20 claims
- 0559US9424636B2Method for measuring positions of structures on a mask and thereby determining mask manufacturing errorsKLA TENCOR CORP·Filed 2015·Granted Aug 23, 2016·1 cites·13 claims
- 0643US11156927B1System and method for switching between an EUV pellicle and an optical pellicleKLA TENCOR CORP·Filed 2018·Granted Oct 26, 2021·0 cites·22 claims
- 0733US2015310160A1Method, system and computer program product for generating high density registration maps for masksKLA TENCOR CORP·Filed 2015·Application pending·0 cites
- 0832US2015226539A1System and method for determining the position of defects on objects, coordinate measuring unit and computer program for coordinate measuring unitKLA TENCOR CORP·Filed 2015·Application pending·0 cites
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