Inventor · disambiguated record
Masayuki Akagawa
Also filed as: AKAGAWA MASAYUKI
6 granted patents·2 pending applications·789 citations·filing 1988–2008
88Inventor score
Top patents by PatentIndex Score
8 records- 0198US7963736B2Wafer processing apparatus with wafer alignment deviceASM JAPAN·Filed 2008·Granted Jun 21, 2011·539 cites·16 claims
- 0292US4856904AWafer inspecting apparatusNIKON CORP·Filed 1988·Granted Aug 15, 1989·142 cites·14 claims
- 0390US6288769B1Optical device method of cleaning the same, projection aligner, and method of producing the sameNIKON CORP·Filed 1999·Granted Sep 11, 2001·70 cites·14 claims
- 0475US6762412B1Optical apparatus, exposure apparatus using the same, and gas introduction methodNIKON CORP·Filed 2000·Granted Jul 13, 2004·15 cites·18 claims
- 0575US6671033B2Optical device, method of cleaning the same, projection aligner, and method of producing the sameNIKON CORP·Filed 2002·Granted Dec 30, 2003·11 cites·35 claims
- 0645US5888327APellicle pasting system and methodNIKON CORP·Filed 1997·Granted Mar 30, 1999·12 cites·30 claims
- 0741US2004008328A1Optical device, method of cleaning the same, projection aligner, and method of producing the sameNIKON CORP·Filed 2003·Application pending·0 cites
- 0839US2001055099A1Optical device, method for cleaning the same, projection aligner, and method of producing the sameNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →