Inventor · disambiguated record
Woong-Kyu Son
Also filed as: SON WOONG-KYU
3 granted patents·4 citations·filing 2013–2016
55Inventor score
Files withSAMSUNG ELECTRONICS CO LTD3
Top patents by PatentIndex Score
3 records- 0177US9322771B2Apparatus and method for monitoring semiconductor fabrication processes using polarized lightSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 26, 2016·4 cites·18 claims
- 0246US9165354B2Method of analyzing photolithography processesSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Oct 20, 2015·0 cites·19 claims
- 0344US9551653B2Methods for monitoring semiconductor fabrication processes using polarized lightSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 24, 2017·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →