Inventor · disambiguated record
Tae-Yeol Heo
Also filed as: HEO TAE-YEOL
6 granted patents·1 pending application·63 citations·filing 1998–2004
81Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
7 records- 0181US6552337B1Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurementsSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Apr 22, 2003·31 cites·18 claims
- 0268US6724474B1Wafer surface inspection methodSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Apr 20, 2004·17 cites·14 claims
- 0356US7258931B2Semiconductor wafers having asymmetric edge profiles that facilitate high yield processing by inhibiting particulate contaminationSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 21, 2007·7 cites·6 claims
- 0443US2005016470A1Susceptor and deposition apparatus including the sameFiled 2004·Application pending·0 cites
- 0535US5972863ASlurry compositions for polishing wafers used in integrated circuit devices and cleaning compositions for removing electron wax after polishingSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Oct 26, 1999·5 cites·4 claims
- 0633US6919214B2Apparatus for analyzing a substrate employing a copper decorationSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jul 19, 2005·0 cites·19 claims
- 0731US6252228B1Method of analyzing morphology of bulk defect and surface defect on semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jun 26, 2001·3 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →