Inventor · disambiguated record
Richard M. Blank
Also filed as: BLANK RICHARD · BLANK RICHARD M
36 granted patents·11 pending applications·617 citations·filing 2001–2025
97Inventor score
Technology areasH10P
Top patents by PatentIndex Score
47 records- 0199US10109517B1Rotational indexer with additional rotational axesLAM RES CORP·Filed 2018·Granted Oct 23, 2018·58 cites·20 claims
- 0299US9472432B1Dedicated hot and cold end effectors for improved throughputNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 18, 2016·337 cites·19 claims
- 0398US10155309B1Wafer handling robots with rotational joint encodersLAM RES CORP·Filed 2017·Granted Dec 18, 2018·26 cites·18 claims
- 0495US9190306B2Dual arm vacuum robotLAM RES CORP·Filed 2013·Granted Nov 17, 2015·25 cites·14 claims
- 0594US10483142B1Vacuum robot positioning system with reduced sensitivity to chamber pressureLAM RES CORP·Filed 2018·Granted Nov 19, 2019·10 cites·19 claims
- 0694US9299598B2Robot with integrated alignerLAM RES CORP·Filed 2013·Granted Mar 29, 2016·17 cites·15 claims
- 0792US10651065B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2018·Granted May 12, 2020·6 cites·23 claims
- 0891US7048316B1Compound angled pad end-effectorNOVELLUS SYSTEMS INC·Filed 2002·Granted May 23, 2006·64 cites·25 claims
- 0989US10796940B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2018·Granted Oct 6, 2020·5 cites·34 claims
- 1089US8985935B2Mass damper for semiconductor wafer handling end effectorNOVELLUS SYSTEMS INC·Filed 2013·Granted Mar 24, 2015·11 cites·19 claims
- 1186US11521869B2Reduced footprint platform architecture with linear vacuum transfer moduleLAM RES CORP·Filed 2018·Granted Dec 6, 2022·3 cites·15 claims
- 1286US11024531B2Optimized low energy / high productivity deposition systemLAM RES CORP·Filed 2018·Granted Jun 1, 2021·4 cites·16 claims
- 1385US10515834B2Multi-station tool with wafer transfer microclimate systemsLAM RES CORP·Filed 2016·Granted Dec 24, 2019·4 cites·17 claims
- 1484US12489006B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2023·Granted Dec 2, 2025·0 cites·20 claims
- 1584US11512393B2Dynamic sheath control with edge ring liftLAM RES CORP·Filed 2018·Granted Nov 29, 2022·3 cites·20 claims
- 1682US8961099B2Dual arm vacuum robot with common drive pulleyBLANK RICHARD M·Filed 2013·Granted Feb 24, 2015·15 cites·15 claims
- 1780US11581214B2Enhanced automatic wafer centering system and techniques for sameLAM RES CORP·Filed 2019·Granted Feb 14, 2023·2 cites·32 claims
- 1878US2024194505A1Transfer robot for reduced footprint platform architectureLAM RES CORP·Filed 2024·Application pending·0 cites
- 1977US11908714B2Transfer robot for reduced footprint platform architectureLAM RES CORP·Filed 2022·Granted Feb 20, 2024·0 cites·20 claims
- 2077US11742229B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2021·Granted Aug 29, 2023·0 cites·20 claims
- 2177US11699610B2Rotational indexer with additional rotational axesLAM RES CORP·Filed 2022·Granted Jul 11, 2023·0 cites·20 claims
- 2276US9349629B2Touch auto-calibration of process modulesLAM RES CORP·Filed 2014·Granted May 24, 2016·3 cites·20 claims
- 2375US11482436B2Rotational indexer with additional rotational axesLAM RES CORP·Filed 2019·Granted Oct 25, 2022·1 cites·31 claims
- 2475US9245783B2Vacuum robot with linear translation carriageNOVELLUS SYSTEMS INC·Filed 2013·Granted Jan 26, 2016·3 cites·23 claims
- 2573US6682295B2Flatted object passive alignerNOVELLUS SYSTEMS INC·Filed 2001·Granted Jan 27, 2004·16 cites·21 claims
- 2672US2025293063A1Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2025·Application pending·0 cites
- 2771US11239100B2Auto-calibration to a station of a process module that spins a waferLAM RES CORP·Filed 2020·Granted Feb 1, 2022·0 cites·20 claims
- 2870US12480208B2Dynamic sheath control with edge ring liftLAM RES CORP·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 2970US10509052B2Smart vibration wafer with optional integration with semiconductor processing toolLAM RES CORP·Filed 2017·Granted Dec 17, 2019·2 cites·20 claims
- 3067US9576833B2Robot for a substrate processing systemLAM RES CORP·Filed 2015·Granted Feb 21, 2017·1 cites·18 claims
- 3166US12322641B2Mechanical indexer for multi-station process moduleLAM RES CORP·Filed 2021·Granted Jun 3, 2025·0 cites·9 claims
- 3259US9214375B2End effector having multiple-position contact pointsRODNICK MATTHEW J·Filed 2012·Granted Dec 15, 2015·1 cites·11 claims
- 3358US2025250125A1Shallow-depth equipment front end module with robotLAM RES CORP·Filed 2023·Application pending·0 cites
- 3456US12341040B2Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health checkLAM RES CORP·Filed 2020·Granted Jun 24, 2025·0 cites·19 claims
- 3556US2025046643A1Direct-pick robot for multi-station semiconductor processing chambersLAM RES CORP·Filed 2022·Application pending·0 cites
- 3656US2025029860A1Nesting atmospheric robot arms for high throughputLAM RES CORP·Filed 2022·Application pending·0 cites
- 3755US2025062156A1Hexapod-based pedestal systems for use in semiconductor processing operationsLAM RES CORP·Filed 2022·Application pending·0 cites
- 3853US2025118592A1Apparatuses for backside wafer processing with edge-only wafer contactLAM RES CORP·Filed 2023·Application pending·0 cites
- 3952US12485554B2Wafer handling robot with gravitational field sensorLAM RES CORP·Filed 2020·Granted Dec 2, 2025·0 cites·20 claims
- 4052US2024353217A1Showerhead to pedestal gapping with differential capacitive sensor substrateLAM RES CORP·Filed 2022·Application pending·0 cites
- 4151US2024234106A9Tripolar electrode arrangement for electrostatic chucksLAM RES CORP·Filed 2022·Application pending·0 cites
- 4250US11833662B2Wafer handling robot with radial gas curtain and/or interior volume controlLAM RES CORP·Filed 2021·Granted Dec 5, 2023·0 cites·17 claims
- 4348US12168301B2Fixture for automatic calibration of substrate transfer robotLAM RES CORP·Filed 2020·Granted Dec 17, 2024·0 cites·21 claims
- 4447US2024213070A1Rotational indexers with wafer centering capabilityLAM RES CORP·Filed 2022·Application pending·0 cites
- 4543US12272583B2Reduced footprint wafer handling platformLAM RES CORP·Filed 2019·Granted Apr 8, 2025·0 cites·20 claims
- 4636US9275884B2Systems and methods for inhibiting oxide growth in substrate handler vacuum chambersKHOSLA MUKUL·Filed 2012·Granted Mar 1, 2016·0 cites·9 claims
- 4735US2017040205A1High-hardness-material-powder infused elastomer for high friction and compliance for silicon wafer transferLAM RES CORP·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →