Inventor · disambiguated record

Shinji Sugahara

Also filed as: SUGAHARA SHINJI

2 granted patents·7 citations·filing 2011–2019

45Inventor score

Technology areasH10P

Files withNAKAMOTO NAOKO1 TOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0173US8969172B2Method for forming isolation structureNAKAMOTO NAOKO·Filed 2011·Granted Mar 3, 2015·7 cites·20 claims
0242US11043399B2Substrate processing apparatus and operation method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 22, 2021·0 cites·19 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →