Inventor · disambiguated record
Takashi Yabuta
Also filed as: YABUTA TAKASHI
14 granted patents·2 pending applications·71 citations·filing 2000–2021
89Inventor score
Top patents by PatentIndex Score
16 records- 0188US8113221B2Substrate cleaning method, substrate cleaning apparatus and computer readable recording mediumNANBA HIROMITSU·Filed 2011·Granted Feb 14, 2012·10 cites·14 claims
- 0282US8475668B2Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored thereinTANAKA HIROSHI·Filed 2010·Granted Jul 2, 2013·6 cites·6 claims
- 0378US9192878B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Nov 24, 2015·5 cites·13 claims
- 0477US10236192B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Mar 19, 2019·5 cites·11 claims
- 0577US6513537B1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Feb 4, 2003·20 cites·11 claims
- 0674US11414514B2Polyether polyol production method and polyurethane foam production methodSANYO CHEMICAL IND LTD·Filed 2017·Granted Aug 16, 2022·1 cites·14 claims
- 0772US6630534B1Polyurethane paste composition and sealing materialSANYO CHEMICAL IND LTD·Filed 2000·Granted Oct 7, 2003·16 cites·24 claims
- 0862US7927429B2Substrate cleaning method, substrate cleaning apparatus and computer readable recording mediumTOKYO ELECTRON LTD·Filed 2004·Granted Apr 19, 2011·7 cites·12 claims
- 0957US8303723B2Liquid processing apparatus, liquid processing method, and storage mediumMINAMI TERUOMI·Filed 2009·Granted Nov 6, 2012·1 cites·11 claims
- 1047US12170209B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 17, 2024·0 cites·8 claims
- 1146US8308870B2Cleaning apparatus, cleaning method and recording mediumMINAMI TERUOMI·Filed 2009·Granted Nov 13, 2012·0 cites·10 claims
- 1246US2010108096A1Liquid processing method and apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1343US8859647B2Antistatic resin compositionYABUTA TAKASHI·Filed 2010·Granted Oct 14, 2014·0 cites·15 claims
- 1441US10748790B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Aug 18, 2020·0 cites·10 claims
- 1540US2014377463A1Liquid processing method, liquid processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1631US9862007B2Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded thereinTOKYO ELECTRON LTD·Filed 2015·Granted Jan 9, 2018·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →