Inventor · disambiguated record
Francois Xavier Debiesme
Also filed as: DEBIESME FRANCOIS XAVIER
5 granted patents·21 citations·filing 2008–2018
75Inventor score
Top patents by PatentIndex Score
5 records- 0182US9715171B2Imprint lithographic apparatus and imprint lithographic methodBUTLER HANS·Filed 2010·Granted Jul 25, 2017·4 cites·11 claims
- 0280US8553199B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Oct 8, 2013·6 cites·22 claims
- 0379US8243258B2Lithographic apparatus having acoustic resonatorBUTLER HANS·Filed 2008·Granted Aug 14, 2012·5 cites·25 claims
- 0471US9378722B2Lithographic apparatus with actuator to compensate acoustic vibrationBUTLER HANS·Filed 2008·Granted Jun 28, 2016·6 cites·28 claims
- 0545US11835106B2Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Dec 5, 2023·0 cites·12 claims
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