Inventor · disambiguated record
Martijn Maria Zaal
Also filed as: ZAAL MARTIJN MARIA
6 granted patents·18 citations·filing 2017–2021
76Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0190US10811323B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2017·Granted Oct 20, 2020·4 cites·21 claims
- 0289US10520830B2Method and device for determining adjustments to sensitivity parametersASML NETHERLANDS BV·Filed 2018·Granted Dec 31, 2019·14 cites·20 claims
- 0375US11710668B2Method and apparatus to determine a patterning process parameterASML NETHERLANDS BV·Filed 2020·Granted Jul 25, 2023·0 cites·20 claims
- 0466US11604419B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2021·Granted Mar 14, 2023·0 cites·20 claims
- 0556US11022897B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2018·Granted Jun 1, 2021·0 cites·20 claims
- 0646US10585354B2Method of optimizing a metrology processASML NETHERLANDS BV·Filed 2019·Granted Mar 10, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →