Inventor · disambiguated record
Taishi Ebisudani
Also filed as: EBISUDANI TAISHI
6 granted patents·413 citations·filing 2017–2020
83Inventor score
Technology areasH10P
Files withASM IP HOLDING BV6
Top patents by PatentIndex Score
6 records- 0195US10580645B2Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursorsASM IP HOLDING BV·Filed 2018·Granted Mar 3, 2020·17 cites·20 claims
- 0295US10529554B2Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenchesASM IP HOLDING BV·Filed 2017·Granted Jan 7, 2020·377 cites·13 claims
- 0393US10381219B1Methods for forming a silicon nitride filmASM IP HOLDING BV·Filed 2018·Granted Aug 13, 2019·17 cites·18 claims
- 0481US11676812B2Method for forming silicon nitride film selectively on top/bottom portionsASM IP HOLDING BV·Filed 2020·Granted Jun 13, 2023·1 cites·10 claims
- 0572US10720322B2Method for forming silicon nitride film selectively on top surfaceASM IP HOLDING BV·Filed 2018·Granted Jul 21, 2020·1 cites·5 claims
- 0644US10707073B2Film forming method and patterning methodASM IP HOLDING BV·Filed 2017·Granted Jul 7, 2020·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →