Inventor · disambiguated record
Leonard M. Rubin
Also filed as: RUBIN LEONARD M · RUBIN LEONARD MICHAEL
4 granted patents·1 pending application·34 citations·filing 1998–2007
71Inventor score
Files withAXCELIS TECH INC5
Top patents by PatentIndex Score
5 records- 0168US6255662B1Rutherford backscattering detection for use in Ion implantationAXCELIS TECH INC·Filed 1998·Granted Jul 3, 2001·27 cites·21 claims
- 0260US7714406B2Low-cost electrostatic clamp with fast de-clamp timeAXCELIS TECH INC·Filed 2007·Granted May 11, 2010·2 cites·13 claims
- 0358US6984832B2Beam angle control in a batch ion implantation systemAXCELIS TECH INC·Filed 2004·Granted Jan 10, 2006·5 cites·31 claims
- 0447US7728293B2Structures and methods for measuring beam angle in an ion implanterAXCELIS TECH INC·Filed 2007·Granted Jun 1, 2010·0 cites·25 claims
- 0543US2007176123A1Ion implanter having a superconducting magnetAXCELIS TECH INC·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →