Inventor · disambiguated record
Patrick J. Helly
Also filed as: HELLY PATRICK J · HELLY PATRICK JOSEPH
3 granted patents·6 pending applications·33 citations·filing 2000–2011
71Inventor score
Top patents by PatentIndex Score
9 records- 0188US7514119B2Method and apparatus for using solution based precursors for atomic layer depositionLINDE INC·Filed 2006·Granted Apr 7, 2009·16 cites·1 claims
- 0268US6444013B1Purification of methylsilanesBOC GROUP INC·Filed 2000·Granted Sep 3, 2002·6 cites·14 claims
- 0365US6936537B2Methods for forming low-k dielectric filmsBOC GROUP INC·Filed 2002·Granted Aug 30, 2005·11 cites·30 claims
- 0449US2009220374A1Method and apparatus for using solution precursors for atomic layer depositionMA CE·Filed 2009·Application pending·0 cites
- 0547US2010036144A1Methods for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 0645US2012295038A1Method and apparatus for using solution based precursors for atomic layer depositionMA CE·Filed 2011·Application pending·0 cites
- 0745US2012294753A1Method and apparatus for using solution based precursors for atomic layer depositionMA CE·Filed 2011·Application pending·0 cites
- 0839US2010151261A1Methods and apparatus for the vaporization and delivery of solution precursors for atomic layer depositionMA CE·Filed 2007·Application pending·0 cites
- 0938US2007077778A1Method of forming low dielectric constant layerBOC GROUP INC·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →