Inventor · disambiguated record
Tomoatsu Ishibashi
Also filed as: ISHIBASHI TOMOATSU
54 granted patents·12 pending applications·168 citations·filing 2007–2025
98Inventor score
Top patents by PatentIndex Score
66 records- 0195US10453708B2Cleaning device and roll cleaning memberEBARA CORP·Filed 2015·Granted Oct 22, 2019·15 cites·8 claims
- 0294US10170344B2Washing device and washing methodEBARA CORP·Filed 2015·Granted Jan 1, 2019·8 cites·16 claims
- 0388US10008380B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2014·Granted Jun 26, 2018·7 cites·26 claims
- 0488US9142399B2Substrate cleaning methodEBARA CORP·Filed 2013·Granted Sep 22, 2015·8 cites·4 claims
- 0587US11164758B2Washing device and washing methodEBARA CORP·Filed 2018·Granted Nov 2, 2021·3 cites·4 claims
- 0685US10090189B2Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzleEBARA CORP·Filed 2014·Granted Oct 2, 2018·6 cites·25 claims
- 0784US10471481B2Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of theseEBARA CORP·Filed 2015·Granted Nov 12, 2019·3 cites·21 claims
- 0884US10395949B2Substrate drying apparatus, storage medium, and substrate drying methodEBARA CORP·Filed 2015·Granted Aug 27, 2019·4 cites·15 claims
- 0984US8769842B2Substrate drying apparatus, substrate drying method and control programEBARA CORP·Filed 2013·Granted Jul 8, 2014·5 cites·16 claims
- 1081US10625308B2Cleaning device, method of manufacturing the same and substrate cleaning apparatusEBARA CORP·Filed 2017·Granted Apr 21, 2020·2 cites·14 claims
- 1181US2025357152A1Substrate drying device and substrate drying methodEBARA CORP·Filed 2025·Application pending·0 cites
- 1280US11660643B2Substrate cleaning device and substrate cleaning methodEBARA CORP·Filed 2019·Granted May 30, 2023·2 cites·8 claims
- 1380US9677811B2Substrate cleaning and drying apparatusEBARA CORP·Filed 2014·Granted Jun 13, 2017·4 cites·5 claims
- 1479US10737301B2Substrate cleaning apparatusEBARA CORP·Filed 2013·Granted Aug 11, 2020·4 cites·11 claims
- 1575US10002778B2Substrate cleaning apparatusEBARA CORP·Filed 2015·Granted Jun 19, 2018·2 cites·7 claims
- 1674US12394639B2Substrate drying device and substrate drying methodEBARA CORP·Filed 2022·Granted Aug 19, 2025·0 cites·1 claims
- 1774US9162337B2Polishing apparatusEBARA CORP·Filed 2013·Granted Oct 20, 2015·2 cites·8 claims
- 1874US9011605B2Substrate cleaning method and roll cleaning memberISHIBASHI TOMOATSU·Filed 2012·Granted Apr 21, 2015·3 cites·7 claims
- 1972US9466512B2Substrate cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2014·Granted Oct 11, 2016·2 cites·16 claims
- 2071US11837477B2Washing device and washing methodEBARA CORP·Filed 2021·Granted Dec 5, 2023·0 cites·4 claims
- 2171US10192757B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2014·Granted Jan 29, 2019·2 cites·13 claims
- 2271US9824903B2Substrate cleaning apparatusEBARA CORP·Filed 2014·Granted Nov 21, 2017·2 cites·11 claims
- 2370USD822926SSponge for substrate cleaningEBARA CORP·Filed 2017·Granted Jul 10, 2018·10 cites·1 claims
- 2469US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
- 2569US9643216B2Cleaning device, method of manufacturing the same and substrate cleaning apparatusEBARA CORP·Filed 2015·Granted May 9, 2017·1 cites·13 claims
- 2668US10991602B2Substrate washing deviceEBARA CORP·Filed 2017·Granted Apr 27, 2021·1 cites·7 claims
- 2768USD707408SRoller for semiconductor wafer cleaningISHIBASHI TOMOATSU·Filed 2011·Granted Jun 17, 2014·16 cites·1 claims
- 2867US2025010322A1Substrate processing system and decompression structureEBARA CORP·Filed 2024·Application pending·0 cites
- 2965US9640384B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2013·Granted May 2, 2017·1 cites·4 claims
- 3064US9058977B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2013·Granted Jun 16, 2015·1 cites·13 claims
- 3164USD728177SRoller shaft for substrate cleaningEBARA CORP·Filed 2013·Granted Apr 28, 2015·12 cites·1 claims
- 3263US2025096012A1Substrate processing module and substrate processing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 3361US2024213045A1Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2023·Application pending·0 cites
- 3460USD787143SSponge for substrate cleaningEBARA CORP·Filed 2016·Granted May 16, 2017·8 cites·1 claims
- 3559US11642704B2Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of theseEBARA CORP·Filed 2019·Granted May 9, 2023·0 cites·5 claims
- 3658USD805268SSponge for substrate cleaningEBARA CORP·Filed 2016·Granted Dec 12, 2017·7 cites·1 claims
- 3754USD800401SRoller for substrate cleaningEBARA CORP·Filed 2016·Granted Oct 17, 2017·6 cites·1 claims
- 3854USD710062SRoller shaft for semiconductor cleaningISHIBASHI TOMOATSU·Filed 2011·Granted Jul 29, 2014·9 cites·1 claims
- 3953US12485516B2Substrate cleaning apparatus, polishing apparatus, buffing apparatus, substrate cleaning method, substrate processing apparatus, and machine learning apparatusEBARA CORP·Filed 2020·Granted Dec 2, 2025·0 cites·8 claims
- 4052USD735427SRoller shaft for substrate cleaningEBARA CORP·Filed 2013·Granted Jul 28, 2015·7 cites·1 claims
- 4150US10315232B2Cleaning member and substrate cleaning apparatusEBARA CORP·Filed 2017·Granted Jun 11, 2019·0 cites·10 claims
- 4249US11180303B2Storage container of scrubbing member and package of sameEBARA CORP·Filed 2018·Granted Nov 23, 2021·0 cites·6 claims
- 4348US11626299B2Cover for swing member of substrate processing apparatus, swing member of substrate processing apparatus, and substrate processing apparatusEBARA CORP·Filed 2020·Granted Apr 11, 2023·0 cites·13 claims
- 4448US11424138B2Substrate cleaning tool, substrate cleaning apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate cleaning toolEBARA CORP·Filed 2019·Granted Aug 23, 2022·0 cites·8 claims
- 4548US9630296B2Substrate processing apparatusEBARA CORP·Filed 2014·Granted Apr 25, 2017·0 cites·10 claims
- 4648US9142398B2Substrate processing methodEBARA CORP·Filed 2014·Granted Sep 22, 2015·0 cites·10 claims
- 4747US12033847B2Cleaning module, substrate processing apparatus including cleaning module, and cleaning methodEBARA CORP·Filed 2019·Granted Jul 9, 2024·0 cites·12 claims
- 4847US11817311B2Substrate cleaning method and substrate cleaning apparatusEBARA CORP·Filed 2020·Granted Nov 14, 2023·0 cites·7 claims
- 4947US2011289795A1Substrate drying apparatus, substrate drying method and control programISHIBASHI TOMOATSU·Filed 2011·Application pending·0 cites
- 5046US2021242015A1Substrate processing apparatus and substrate cleaning methodEBARA CORP·Filed 2020·Application pending·0 cites
Showing the top 50 of 66 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →