Inventor · disambiguated record
Yu Yoshino
Also filed as: YOSHINO YU
7 granted patents·2 pending applications·4 citations·filing 2009–2022
72Inventor score
Top patents by PatentIndex Score
9 records- 0169US9214364B2Substrate cleaning apparatus and vacuum processing systemDOBASHI KAZUYA·Filed 2012·Granted Dec 15, 2015·3 cites·13 claims
- 0263US12172198B2Gas cluster processing device and gas cluster processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Dec 24, 2024·0 cites·7 claims
- 0356US9159622B2Dividing method for waferDISCO CORP·Filed 2014·Granted Oct 13, 2015·1 cites·2 claims
- 0449US11267021B2Gas cluster processing device and gas cluster processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 8, 2022·0 cites·6 claims
- 0548US9533268B2Method and apparatus for supplying mixed gasIWATANI CORP·Filed 2014·Granted Jan 3, 2017·0 cites·8 claims
- 0646US8461051B2Cluster jet processing method, semiconductor element, microelectromechanical element, and optical componentKOIKE KUNIHIKO·Filed 2009·Granted Jun 11, 2013·0 cites·15 claims
- 0739US2014061031A1Processing method utilizing clusterIWATANI CORP·Filed 2013·Application pending·0 cites
- 0835US2012071003A1Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Machining ApparatusDOBASHI KAZUYA·Filed 2011·Application pending·0 cites
- 0931US9416445B2Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluorideYOSHINO YU·Filed 2012·Granted Aug 16, 2016·0 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →