Inventor · disambiguated record
Gildardo Delgado
Also filed as: DELGADO GILDARDO · DELGADO GILDARDO R · DELGADO GILDARDO RIOS
50 granted patents·9 pending applications·232 citations·filing 2005–2022
97Inventor score
Top patents by PatentIndex Score
59 records- 0197US9818887B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2016·Granted Nov 14, 2017·11 cites·15 claims
- 0297US9496425B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2013·Granted Nov 15, 2016·29 cites·26 claims
- 0397US7652430B1Broadband plasma light sources with cone-shaped electrode for substrate processingKLA TENCOR TECH CORP·Filed 2005·Granted Jan 26, 2010·40 cites·32 claims
- 0496US10121914B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2017·Granted Nov 6, 2018·9 cites·14 claims
- 0596US8414688B1Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shippingDELGADO GILDARDO·Filed 2011·Granted Apr 9, 2013·41 cites·20 claims
- 0695US10446696B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2018·Granted Oct 15, 2019·5 cites·18 claims
- 0795US9099292B1Laser-sustained plasma light sourceBEZEL ILYA·Filed 2010·Granted Aug 4, 2015·34 cites·9 claims
- 0893US9263238B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2015·Granted Feb 16, 2016·10 cites·39 claims
- 0990US8216773B1Broadband plasma light sources for substrate processingDELGADO GILDARDO R·Filed 2010·Granted Jul 10, 2012·11 cites·13 claims
- 1088US9810991B2System and method for cleaning EUV optical elementsKLA TENCOR CORP·Filed 2014·Granted Nov 7, 2017·5 cites·21 claims
- 1188US9721761B2Open plasma lamp for forming a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Aug 1, 2017·4 cites·70 claims
- 1282US11268911B2Boron-based capping layers for EUV opticsKLA TENCOR CORP·Filed 2019·Granted Mar 8, 2022·2 cites·9 claims
- 1382US9526158B1Laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2015·Granted Dec 20, 2016·2 cites·20 claims
- 1478US10395884B2Ruthenium encapsulated photocathode electron emitterKLA TENCOR CORP·Filed 2018·Granted Aug 27, 2019·2 cites·20 claims
- 1578US9335279B2Pre and post cleaning of mask, wafer, optical surfaces for prevention of contamination prior to and after inspectionDELGADO GILDARDO·Filed 2012·Granted May 10, 2016·4 cites·6 claims
- 1678US9244368B2Particle control near reticle and optics using showerheadDELGADO GILDARDO R·Filed 2013·Granted Jan 26, 2016·3 cites·16 claims
- 1777US9573111B1High purity ozone generator for optics cleaning and recoveryKLA TENCOR CORP·Filed 2013·Granted Feb 21, 2017·3 cites·9 claims
- 1876US11217416B2Plasmonic photocathode emittersKLA CORP·Filed 2020·Granted Jan 4, 2022·1 cites·19 claims
- 1976US9389180B2Methods and apparatus for use with extreme ultraviolet light having contamination protectionKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·2 cites·29 claims
- 2076US9188544B2Protective fluorine-doped silicon oxide film for optical componentsKLA TENCOR CORP·Filed 2013·Granted Nov 17, 2015·3 cites·12 claims
- 2173US10535493B2Photocathode designs and methods of generating an electron beam using a photocathodeKLA TENCOR CORP·Filed 2018·Granted Jan 14, 2020·1 cites·19 claims
- 2271US9516733B1Laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2015·Granted Dec 6, 2016·1 cites·14 claims
- 2370US10748737B2Electron beam generation and measurementKLA TENCOR CORP·Filed 2018·Granted Aug 18, 2020·1 cites·17 claims
- 2470US10741354B1Photocathode emitter system that generates multiple electron beamsKLA TENCOR CORP·Filed 2018·Granted Aug 11, 2020·1 cites·18 claims
- 2569US9984846B2High brightness boron-containing electron beam emitters for use in a vacuum environmentKLA TENCOR CORP·Filed 2016·Granted May 29, 2018·1 cites·20 claims
- 2668US10692692B2System and method for providing a clean environment in an electron-optical systemKLA TENCOR CORP·Filed 2016·Granted Jun 23, 2020·1 cites·17 claims
- 2768US9842724B2Method and system for imaging of a photomask through a pellicleKLA TENCOR CORP·Filed 2016·Granted Dec 12, 2017·1 cites·26 claims
- 2868US9662688B2Apparatus and method for cross-flow purge for optical components in a chamberKLA TENCOR CORP·Filed 2013·Granted May 30, 2017·1 cites·16 claims
- 2965US10953441B2System and method for cleaning optical surfaces of an extreme ultraviolet optical systemKLA TENCOR CORP·Filed 2013·Granted Mar 23, 2021·1 cites·18 claims
- 3064US9335637B2Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablationDELGADO GILDARDO·Filed 2011·Granted May 10, 2016·1 cites·18 claims
- 3162US11495428B2Plasmonic photocathode emitters at ultraviolet and visible wavelengthsKLA CORP·Filed 2020·Granted Nov 8, 2022·0 cites·20 claims
- 3261US10804069B2Photocathode designs and methods of generating an electron beam using a photocathodeKLA TENCOR CORP·Filed 2019·Granted Oct 13, 2020·0 cites·20 claims
- 3360US8790603B2Apparatus for purifying a controlled-pressure environmentKLA TENCOR CORP·Filed 2013·Granted Jul 29, 2014·0 cites·30 claims
- 3459US11156926B2Vacuum actuator containment for molecular contaminant and particle mitigationKLA CORP·Filed 2020·Granted Oct 26, 2021·0 cites·20 claims
- 3558US10714294B2Metal protective layer for electron emitters with a diffusion barrierKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·0 cites·16 claims
- 3657US11262664B2System and method for protecting optics from vacuum ultraviolet lightKLA CORP·Filed 2020·Granted Mar 1, 2022·0 cites·21 claims
- 3757US9891356B1Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufactureKLA TENCOR CORP·Filed 2015·Granted Feb 13, 2018·1 cites·42 claims
- 3855US12510692B2Protection of optical materials of optical components from radiation degradationKLA CORP·Filed 2021·Granted Dec 30, 2025·0 cites·17 claims
- 3955US11715622B2Material recovery systems for optical componentsKLA CORP·Filed 2021·Granted Aug 1, 2023·0 cites·16 claims
- 4054US10714307B2Neutral atom imaging systemKLA TENCOR CORP·Filed 2018·Granted Jul 14, 2020·0 cites·23 claims
- 4153US11543757B2System and method for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systemsKLA CORP·Filed 2021·Granted Jan 3, 2023·0 cites·40 claims
- 4253US10714295B2Metal encapsulated photocathode electron emitterKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·0 cites·19 claims
- 4353US10141155B2Electron beam emitters with ruthenium coatingKLA TENCOR CORP·Filed 2017·Granted Nov 27, 2018·0 cites·20 claims
- 4453US2013271827A1Indexing optics for an actinic extreme ultra-violet (euv) reticle inspection toolKLA TENCOR CORP·Filed 2013·Application pending·0 cites
- 4553US2022316045A1System and method for ion-assisted deposition of optical coatingsKLA CORP·Filed 2022·Application pending·0 cites
- 4652US10607806B2Silicon electron emitter designsKLA TENCOR CORP·Filed 2018·Granted Mar 31, 2020·0 cites·16 claims
- 4750US2013270461A1Smart memory alloys for an extreme ultra-violet (euv) reticle inspection toolKLA TENCOR CORP·Filed 2013·Application pending·0 cites
- 4848US10840055B2System and method for photocathode illumination inspectionKLA TENCOR CORP·Filed 2019·Granted Nov 17, 2020·0 cites·33 claims
- 4946US9759912B2Particle and chemical control using tunnel flowKLA TENCOR CORP·Filed 2013·Granted Sep 12, 2017·0 cites·13 claims
- 5045US9874512B2Method and system for gas flow mitigation of molecular contamination of opticsKLA TENCOR CORP·Filed 2014·Granted Jan 23, 2018·0 cites·16 claims
Showing the top 50 of 59 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →