Inventor · disambiguated record
Arne Thoma
Also filed as: THOMA ARNE
7 granted patents·2 pending applications·42 citations·filing 2015–2025
77Inventor score
Technology areasH01J
Top patents by PatentIndex Score
9 records- 0194US9991089B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Jun 5, 2018·34 cites·24 claims
- 0289US9799485B2Particle beam system and method for operating a particle optical unitZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Oct 24, 2017·8 cites·10 claims
- 0389US2025379030A1Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 0480US2025232951A1Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2025·Application pending·0 cites
- 0571US12293896B2Particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2020·Granted May 6, 2025·0 cites·33 claims
- 0652US12340973B2Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program productCARL ZEISS MULTISEM GMBH·Filed 2022·Granted Jun 24, 2025·0 cites·20 claims
- 0752US12249478B2Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam systemCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Mar 11, 2025·0 cites·25 claims
- 0850US12283457B2Multiple particle beam microscope and associated method with an improved focus setting taking into account an image plane tiltCARL ZEISS MULTISEM GMBH·Filed 2022·Granted Apr 22, 2025·0 cites·16 claims
- 0949US12255040B2Multi-beam particle beam system and method for operating sameCARL ZEISS MULTISEM GMBH·Filed 2021·Granted Mar 18, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →