Inventor · disambiguated record
Naoki Funabashi
Also filed as: FUNABASHI NAOKI
5 granted patents·6 pending applications·4 citations·filing 2008–2025
66Inventor score
Top patents by PatentIndex Score
11 records- 0176US10948829B2Pattern forming apparatus, alignment mark detection method, and pattern forming methodCANON KK·Filed 2019·Granted Mar 16, 2021·2 cites·25 claims
- 0273US10501635B2Magnesium oxide powder, resin composition including same, and method for producing magnesium oxide powderUBE MAT IND LTD·Filed 2016·Granted Dec 10, 2019·1 cites·8 claims
- 0372US2025362471A1Holding apparatus, apparatus for exposing substrate, measurement apparatus, method for manufacturing optical device, and method for manufacturing productCANON KK·Filed 2025·Application pending·0 cites
- 0464US2024345494A1Temperature adjustment apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0559US9740109B2Holding device, lithography apparatus, and method for manufacturing itemCANON KK·Filed 2015·Granted Aug 22, 2017·1 cites·15 claims
- 0658US11774850B2Method for disposing substrate and method for manufacturing articleCANON KK·Filed 2020·Granted Oct 3, 2023·0 cites·13 claims
- 0758US2025256367A1Positioning method, press-fitting apparatus, pin processing method, exposure apparatus, and article manufacturing methodCANON KK·Filed 2025·Application pending·0 cites
- 0855US2024347986A1Plate-shaped member, connector fixing method, lithography apparatus, and manufacturing method of articleCANON KK·Filed 2024·Application pending·0 cites
- 0945US2010055460A1Highly dispersible fine powder of alkaline earth metal carbonate and process for producing the sameUBE MAT IND LTD·Filed 2008·Application pending·0 cites
- 1044US2017351173A1Pattern forming apparatus, method for disposing substrate, and method for manufacturing articleCANON KK·Filed 2017·Application pending·0 cites
- 1135US10431463B2Substrate holding device, lithography apparatus, and article production methodCANON KK·Filed 2015·Granted Oct 1, 2019·0 cites·33 claims
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