Inventor · disambiguated record
Klaus Wellerdieck
Also filed as: WELLERDIECK KLAUS
7 granted patents·1 pending application·185 citations·filing 1989–2003
88Inventor score
Top patents by PatentIndex Score
8 records- 0192US6878248B2Method of manufacturing an object in a vacuum recipientFiled 2003·Granted Apr 12, 2005·46 cites·63 claims
- 0282US6248219B1Process and apparatus for sputter etching or sputter coatingUNAXIS BALZERS AG·Filed 1995·Granted Jun 19, 2001·55 cites·25 claims
- 0375US6176979B1Method of manufacturing an object in a vacuum recipientBALZERS HOCHVAKUUM·Filed 1999·Granted Jan 23, 2001·19 cites·15 claims
- 0475US5948224AMethod of controlling a treatment process and vacuum treatment apparatusBALZERS AKTIENGSELLSCHAFT·Filed 1997·Granted Sep 7, 1999·23 cites·38 claims
- 0573US5460707AEtching or coating method and a plant thereforBALZERS HOCHVAKUUM·Filed 1994·Granted Oct 24, 1995·28 cites·9 claims
- 0652US5064522AFeed through for application of hf energyBALZERS HOCHVAKUUM·Filed 1989·Granted Nov 12, 1991·8 cites·17 claims
- 0751US6149783AVacuum treatment apparatusBALZERS HOCHVAKUUM·Filed 1999·Granted Nov 21, 2000·6 cites·18 claims
- 0846US2002153242A1Method of manufacturing an object in a vacuum recipientUNAXIS BALZERS AG·Filed 2002·Application pending·0 cites
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