Inventor · disambiguated record
Hideo Shite
Also filed as: SHITE HIDEO
9 granted patents·1 pending application·25 citations·filing 2003–2019
82Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0183US10121685B2Treatment solution supply method, non-transitory computer-readable storage medium, and treatment solution supply apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Nov 6, 2018·5 cites·12 claims
- 0278US7790227B2Coating process apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2009·Granted Sep 7, 2010·6 cites·13 claims
- 0375US11664249B2Substrate processing apparatus, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2019·Granted May 30, 2023·2 cites·12 claims
- 0471US10518199B2Treatment solution supply apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Dec 31, 2019·1 cites·11 claims
- 0567US7575634B2Coating device and coating film forming methodTOKYO ELECTRON LTD·Filed 2003·Granted Aug 18, 2009·11 cites·12 claims
- 0644US11465168B2Liquid processing device and liquid processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Oct 11, 2022·0 cites·11 claims
- 0744US2018061690A1Substrate Processing Apparatus, Substrate Processing Method, and Recording MediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 0843US12032294B2Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jul 9, 2024·0 cites·16 claims
- 0936US7384595B2Heat-treating apparatus and heat-treating methodTOKYO ELECTRON LTD·Filed 2004·Granted Jun 10, 2008·0 cites·14 claims
- 1035US11433420B2Solution supply apparatus and solution supply methodTOKYO ELECTRON LTD·Filed 2018·Granted Sep 6, 2022·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →