Inventor · disambiguated record
Christopher W. Burkhart
Also filed as: BURKHART CHRISTOPHER · BURKHART CHRISTOPHER W · BURKHART CHRISTOPHER WILLIAM
26 granted patents·2 pending applications·1,373 citations·filing 1982–2019
97Inventor score
Top patents by PatentIndex Score
28 records- 0197US5238499AGas-based substrate protection during processingNOVELLUS SYSTEMS INC·Filed 1991·Granted Aug 24, 1993·411 cites·23 claims
- 0295US9879795B2Additively manufactured gas distribution manifoldLAM RES CORP·Filed 2016·Granted Jan 30, 2018·19 cites·23 claims
- 0394US10483142B1Vacuum robot positioning system with reduced sensitivity to chamber pressureLAM RES CORP·Filed 2018·Granted Nov 19, 2019·10 cites·19 claims
- 0494US10215317B2Additively manufactured gas distribution manifoldLAM RES CORP·Filed 2016·Granted Feb 26, 2019·14 cites·24 claims
- 0591US10794519B2Additively manufactured gas distribution manifoldLAM RES CORP·Filed 2019·Granted Oct 6, 2020·6 cites·20 claims
- 0691US6602346B1Gas-purged vacuum valveNOVELLUS SYSTEMS INC·Filed 2000·Granted Aug 5, 2003·56 cites·8 claims
- 0790US5230741AGas-based backside protection during substrate processingNOVELLUS SYSTEMS INC·Filed 1990·Granted Jul 27, 1993·118 cites·34 claims
- 0889US5882417AApparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1996·Granted Mar 16, 1999·90 cites·2 claims
- 0988US5620525AApparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrateNOVELLUS SYSTEMS INC·Filed 1994·Granted Apr 15, 1997·114 cites·47 claims
- 1088US4459844AGas separation chamber and portable leak detection systemSMITH & DENISON·Filed 1982·Granted Jul 17, 1984·43 cites·15 claims
- 1186US5425803ADevice for removing dissolved gas from a liquidNOVELLUS SYSTEMS INC·Filed 1994·Granted Jun 20, 1995·58 cites·11 claims
- 1285US5925411AGas-based substrate deposition protectionNOVELLUS SYSTEMS INC·Filed 1995·Granted Jul 20, 1999·72 cites·37 claims
- 1385US5578532AWafer surface protection in a gas deposition processNOVELLUS SYSTEMS INC·Filed 1994·Granted Nov 26, 1996·91 cites·20 claims
- 1482US7585370B2Gas-purged vacuum valveNOVELLUS SYSTEMS INC·Filed 2007·Granted Sep 8, 2009·6 cites·6 claims
- 1581US5843233AExclusion guard and gas-based substrate protection for chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1995·Granted Dec 1, 1998·51 cites·13 claims
- 1680US7754014B2Gas-purged vacuum valveNOVELLUS SYSTEMS INC·Filed 2009·Granted Jul 13, 2010·5 cites·11 claims
- 1780US5769951AExclusion guard and gas-based substrate protection for chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1996·Granted Jun 23, 1998·51 cites·8 claims
- 1878US5374594AGas-based backside protection during substrate processingNOVELLUS SYSTEMS INC·Filed 1993·Granted Dec 20, 1994·56 cites·16 claims
- 1977US4575069ASheet feeding mechanismQUME CORP·Filed 1983·Granted Mar 11, 1986·22 cites·10 claims
- 2073US6682295B2Flatted object passive alignerNOVELLUS SYSTEMS INC·Filed 2001·Granted Jan 27, 2004·16 cites·21 claims
- 2171US5772736ADevice for removing dissolved gas from a liquidNOVELLUS SYSTEMS INC·Filed 1997·Granted Jun 30, 1998·32 cites·34 claims
- 2262US6722665B1MESC seal, O-ring carrierNOVELLUS SYSTEMS INC·Filed 2002·Granted Apr 20, 2004·8 cites·21 claims
- 2361US5645625ADevice for removing dissolved gas from a liquidNOVELLUS SYSTEMS INC·Filed 1995·Granted Jul 8, 1997·24 cites·29 claims
- 2449US11989027B2Dual-mode autonomous guided vehicleLAM RES CORP·Filed 2019·Granted May 21, 2024·0 cites·14 claims
- 2546US11282737B2Moving substrate transfer chamberLAM RES CORP·Filed 2019·Granted Mar 22, 2022·0 cites·16 claims
- 2643US12272583B2Reduced footprint wafer handling platformLAM RES CORP·Filed 2019·Granted Apr 8, 2025·0 cites·20 claims
- 2742US2004007188A1Gas-purged vacuum valveNOVELLUS SYSTEMS INC·Filed 2003·Application pending·0 cites
- 2834US2010296903A1End effector for handling substratesAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →