Inventor · disambiguated record
Hiroshi Shimomoto
Also filed as: SHIMOMOTO HIROSHI
10 granted patents·2 pending applications·57 citations·filing 2000–2020
84Inventor score
Top patents by PatentIndex Score
12 records- 0187US6358125B2Polishing liquid supply apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·39 cites·21 claims
- 0276US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 0368US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 0468US10096492B2Substrate cleaning apparatus and polishing apparatusEBARA CORP·Filed 2013·Granted Oct 9, 2018·2 cites·20 claims
- 0567US6508695B2Pure water reusing systemEBARA CORP·Filed 2001·Granted Jan 21, 2003·12 cites·10 claims
- 0661US11495475B2Method of cleaning a substrateEBARA CORP·Filed 2020·Granted Nov 8, 2022·0 cites·7 claims
- 0753US11541502B2Substrate processing apparatusEBARA CORP·Filed 2020·Granted Jan 3, 2023·0 cites·9 claims
- 0853US9704728B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2013·Granted Jul 11, 2017·0 cites·3 claims
- 0953US8298369B2Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquidMAEDA KOJI·Filed 2007·Granted Oct 30, 2012·1 cites·6 claims
- 1052US9842732B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2017·Granted Dec 12, 2017·0 cites·6 claims
- 1150US2014190633A1Substrate cleaning apparatus and polishing apparatusEBARA CORP·Filed 2013·Application pending·0 cites
- 1243US2015017889A1Polishing apparatusEBARA CORP·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →