Inventor · disambiguated record
Richard Savage
Also filed as: SAVAGE RICHARD · SAVAGE RICHARD N
9 granted patents·1 pending application·442 citations·filing 1978–2001
91Inventor score
Top patents by PatentIndex Score
10 records- 0194US5014217AApparatus and method for automatically identifying chemical species within a plasma reactor environmentS C TECHNOLOGY INC·Filed 1989·Granted May 7, 1991·156 cites·19 claims
- 0288US6846149B2Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemAVIZA TECH INC·Filed 2001·Granted Jan 25, 2005·56 cites·6 claims
- 0388US6610150B1Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemASML US INC·Filed 2000·Granted Aug 26, 2003·56 cites·13 claims
- 0486US6027760APhotoresist coating process control with solvent vapor sensorFiled 1997·Granted Feb 22, 2000·64 cites·25 claims
- 0581US6177133B1Method and apparatus for adaptive process control of critical dimensions during spin coating processSILICON VALLEY GROUP·Filed 1997·Granted Jan 23, 2001·50 cites·5 claims
- 0673USD260338SMacrame poleSAVAGE RICHARD·Filed 1978·Granted Aug 25, 1981·13 cites·1 claims
- 0771US4938555AOptical switchSC TECHNOLOGY INT·Filed 1988·Granted Jul 3, 1990·34 cites·15 claims
- 0850US6242364B1Plasma deposition of spin chucks to reduce contamination of silicon wafersSILICON VALLEY GROUP·Filed 1999·Granted Jun 5, 2001·11 cites·11 claims
- 0937US6955720B2Plasma deposition of spin chucks to reduce contamination of Silicon wafersASML HOLDING NV·Filed 2001·Granted Oct 18, 2005·2 cites·11 claims
- 1035US2001010950A1Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer systemSILICON VALLEY GROUP THERMAL·Filed 2001·Application pending·0 cites
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