Assignee
SILICON VALLEY GROUP
US·49 granted patents·1 pending application·3,080 citations·filing 1978–2001
Top patents by PatentIndex Score
50 records- 0198US6509952B1Method and system for selective linewidth optimization during a lithographic processSILICON VALLEY GROUP·Filed 2000·Granted Jan 21, 2003·322 cites·15 claims
- 0296US6522483B2Optical reduction system with elimination of reticle diffraction induced biasSILICON VALLEY GROUP·Filed 2001·Granted Feb 18, 2003·57 cites·30 claims
- 0394US6307682B1Zoom illumination system for use in photolithographySILICON VALLEY GROUP·Filed 2000·Granted Oct 23, 2001·77 cites·24 claims
- 0494US4770590AMethod and apparatus for transferring wafers between cassettes and a boatSILICON VALLEY GROUP·Filed 1986·Granted Sep 13, 1988·617 cites·21 claims
- 0592US4313266AMethod and apparatus for drying wafersSILICON VALLEY GROUP·Filed 1980·Granted Feb 2, 1982·115 cites·15 claims
- 0691US6538720B2Lithographic tool with dual isolation system and method for configuring the sameSILICON VALLEY GROUP·Filed 2001·Granted Mar 25, 2003·42 cites·24 claims
- 0791US5700046AWafer gripperSILICON VALLEY GROUP·Filed 1995·Granted Dec 23, 1997·183 cites·8 claims
- 0891US4227347ATwo motor drive for a wafer processing machineSILICON VALLEY GROUP·Filed 1978·Granted Oct 14, 1980·37 cites·1 claims
- 0990US6480330B1Ultraviolet polarization beam splitter for microlithographySILICON VALLEY GROUP·Filed 2000·Granted Nov 12, 2002·39 cites·21 claims
- 1090US6327793B1Method for two dimensional adaptive process control of critical dimensions during spin coating processSILICON VALLEY GROUP·Filed 2000·Granted Dec 11, 2001·28 cites·48 claims
- 1190US5733024AModular systemSILICON VALLEY GROUP·Filed 1995·Granted Mar 31, 1998·123 cites·10 claims
- 1290US4658855AMass flow controllerSILICON VALLEY GROUP·Filed 1980·Granted Apr 21, 1987·54 cites·12 claims
- 1389US6098843AChemical delivery systems and methods of deliverySILICON VALLEY GROUP·Filed 1998·Granted Aug 8, 2000·94 cites·17 claims
- 1489US4217977AConveyor systemSILICON VALLEY GROUP·Filed 1978·Granted Aug 19, 1980·69 cites·13 claims
- 1588US5733096AMulti-stage telescoping structureSILICON VALLEY GROUP·Filed 1995·Granted Mar 31, 1998·66 cites·8 claims
- 1688US5670210AMethod of uniformly coating a substrateSILICON VALLEY GROUP·Filed 1995·Granted Sep 23, 1997·91 cites·4 claims
- 1788US5320680APrimary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flowSILICON VALLEY GROUP·Filed 1991·Granted Jun 14, 1994·74 cites·4 claims
- 1887US6239863B1Removable cover for protecting a reticle, system including and method of using the sameSILICON VALLEY GROUP·Filed 1999·Granted May 29, 2001·103 cites·38 claims
- 1985US4886954AHot wall diffusion furnace and method for operating the furnaceSILICON VALLEY GROUP·Filed 1988·Granted Dec 12, 1989·53 cites·10 claims
- 2084US6307619B1Scanning framing blade apparatusSILICON VALLEY GROUP·Filed 2000·Granted Oct 23, 2001·38 cites·14 claims
- 2183US6369874B1Photoresist outgassing mitigation system method and apparatus for in-vacuum lithographySILICON VALLEY GROUP·Filed 2000·Granted Apr 9, 2002·21 cites·25 claims
- 2281US6468586B1Environment exchange control for material on a wafer surfaceSILICON VALLEY GROUP·Filed 2000·Granted Oct 22, 2002·15 cites·12 claims
- 2381US6177133B1Method and apparatus for adaptive process control of critical dimensions during spin coating processSILICON VALLEY GROUP·Filed 1997·Granted Jan 23, 2001·50 cites·5 claims
- 2481US4507078AWafer handling apparatus and methodSILICON VALLEY GROUP·Filed 1983·Granted Mar 26, 1985·57 cites·26 claims
- 2580US6254936B1Environment exchange control for material on a wafer surfaceSILICON VALLEY GROUP·Filed 1998·Granted Jul 3, 2001·33 cites·22 claims
- 2679US6472643B1Substrate thermal management systemSILICON VALLEY GROUP·Filed 2000·Granted Oct 29, 2002·23 cites·56 claims
- 2777US6324003B1Calcium fluoride (CaF2) stress plate and method of making the sameSILICON VALLEY GROUP·Filed 1999·Granted Nov 27, 2001·65 cites·15 claims
- 2876US6005225AThermal processing apparatusSILICON VALLEY GROUP·Filed 1997·Granted Dec 21, 1999·67 cites·68 claims
- 2975US6387602B1Apparatus and method of cleaning reticles for use in a lithography toolSILICON VALLEY GROUP·Filed 2000·Granted May 14, 2002·31 cites·5 claims
- 3075US6238735B1Method of uniformly coating a substrateSILICON VALLEY GROUP·Filed 1999·Granted May 29, 2001·38 cites·30 claims
- 3174US6414276B1Method for substrate thermal managementSILICON VALLEY GROUP·Filed 2000·Granted Jul 2, 2002·14 cites·35 claims
- 3269US5954878AApparatus for uniformly coating a substrateSILICON VALLEY GROUP·Filed 1997·Granted Sep 21, 1999·31 cites·3 claims
- 3368US6059567ASemiconductor thermal processor with recirculating heater exhaust cooling systemSILICON VALLEY GROUP·Filed 1998·Granted May 9, 2000·42 cites·11 claims
- 3466US6248171B1Yield and line width performance for liquid polymers and other materialsSILICON VALLEY GROUP·Filed 1998·Granted Jun 19, 2001·20 cites·4 claims
- 3566US5947136ACatch cup cleaning systemSILICON VALLEY GROUP·Filed 1996·Granted Sep 7, 1999·37 cites·11 claims
- 3662US6416318B1Process chamber assembly with reflective hot plate and pivoting lidSILICON VALLEY GROUP·Filed 2000·Granted Jul 9, 2002·13 cites·44 claims
- 3762US5618351AThermal processing apparatus and processSILICON VALLEY GROUP·Filed 1995·Granted Apr 8, 1997·31 cites·20 claims
- 3858US6616394B1Apparatus for processing wafersSILICON VALLEY GROUP·Filed 1998·Granted Sep 9, 2003·26 cites·8 claims
- 3957US6300600B1Hot wall rapid thermal processorSILICON VALLEY GROUP·Filed 1999·Granted Oct 9, 2001·21 cites·43 claims
- 4056US6246203B1Direct skew control and interlock of gantrySILICON VALLEY GROUP·Filed 1999·Granted Jun 12, 2001·16 cites·46 claims
- 4150US6242364B1Plasma deposition of spin chucks to reduce contamination of silicon wafersSILICON VALLEY GROUP·Filed 1999·Granted Jun 5, 2001·11 cites·11 claims
- 4249US5679168AThermal processing apparatus and processSILICON VALLEY GROUP·Filed 1995·Granted Oct 21, 1997·18 cites·16 claims
- 4349US5626680AThermal processing apparatus and processSILICON VALLEY GROUP·Filed 1995·Granted May 6, 1997·18 cites·15 claims
- 4448US6418356B1Method and apparatus for resolving conflicts in a substrate processing systemSILICON VALLEY GROUP·Filed 1999·Granted Jul 9, 2002·49 cites·23 claims
- 4548US6091056AHot plate oven for processing flat panel displays and large wafersSILICON VALLEY GROUP·Filed 1997·Granted Jul 18, 2000·14 cites·11 claims
- 4647US6570713B2Method and apparatus for optimizing the output beam characteristics of a laserSILICON VALLEY GROUP·Filed 2001·Granted May 27, 2003·1 cites·17 claims
- 4743US5756157AMethod for processing flat panel displays and large wafersSILICON VALLEY GROUP·Filed 1996·Granted May 26, 1998·11 cites·1 claims
- 4842US4721424ASemiconductor wafer boat loader releaseable mountingSILICON VALLEY GROUP·Filed 1986·Granted Jan 26, 1988·14 cites·11 claims
- 4941US4700595ABalance mechanism for movable jaw chuck of a spin stationSILICON VALLEY GROUP·Filed 1986·Granted Oct 20, 1987·11 cites·11 claims
- 5036US2002085185A1Method and system of varying optical imaging performance in the presence of refractive index variationsSILICON VALLEY GROUP·Filed 2001·Application pending·0 cites
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