Inventor · disambiguated record
Jürgen Frosien
Also filed as: FROSIEN JUERGEN · FROSIEN JURGEN · FROSIEN JüRGEN
66 granted patents·10 pending applications·981 citations·filing 1978–2025
99Inventor score
Files withINTEGRATED CIRCUIT TESTING23ADVANTEST CORP15SIEMENS AG7ACT ADVANCED CIRCUIT TESTING6ICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH6
Top patents by PatentIndex Score
76 records- 0199US9922796B1Method for inspecting a specimen and charged particle multi-beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Mar 20, 2018·55 cites·29 claims
- 0298US9035249B1Multi-beam system for high throughput EBIINTEGRATED CIRCUIT TESTING·Filed 2014·Granted May 19, 2015·83 cites·20 claims
- 0398US8378299B2Twin beam charged particle column and method of operating thereofINTEGRATED CIRCUIT TESTING·Filed 2011·Granted Feb 19, 2013·62 cites·16 claims
- 0494US10453645B2Method for inspecting a specimen and charged particle multi-beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2016·Granted Oct 22, 2019·9 cites·20 claims
- 0594US9666405B1System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·13 cites·16 claims
- 0694US9601303B2Charged particle beam device and method for inspecting and/or imaging a sampleICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Mar 21, 2017·11 cites·18 claims
- 0794US8785879B1Electron beam wafer inspection system and method of operation thereofFROSIEN JüRGEN·Filed 2013·Granted Jul 22, 2014·21 cites·20 claims
- 0892US7633074B2Arrangement and method for compensating emitter tip vibrationsINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Dec 15, 2009·15 cites·95 claims
- 0992US7253417B2Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lensINTEGRATED CIRCUIT TESTING·Filed 2003·Granted Aug 7, 2007·39 cites·28 claims
- 1089US6509569B1Deflection arrangement for separating two particle beamsADVANTEST CORP·Filed 2000·Granted Jan 21, 2003·29 cites·10 claims
- 1188US9245709B1Charged particle beam specimen inspection system and method for operation thereofINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Jan 26, 2016·7 cites·20 claims
- 1287US7326927B2Focusing lens and charged particle beam device for titled landing angle operationINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Feb 5, 2008·9 cites·55 claims
- 1386US9589763B1Method for detecting signal charged particles in a charged particle beam device, and charged particle beam deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Mar 7, 2017·4 cites·15 claims
- 1486US9472373B1Beam separator device, charged particle beam device and methods of operating thereofICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Oct 18, 2016·7 cites·20 claims
- 1586US7595490B2Charged particle beam emitting device and method for operating a charged particle beam emitting deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 29, 2009·10 cites·36 claims
- 1686US6407387B1Particle beam apparatusADVANTEST CORP·Filed 1999·Granted Jun 18, 2002·46 cites·13 claims
- 1785US8921804B2High brightness electron gun with moving condenser lensINTEGRATED CIRCUIT TESTING·Filed 2012·Granted Dec 30, 2014·6 cites·18 claims
- 1885US2025308835A1Method for inspecting a specimen and charged particle beam deviceAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1985US2025308836A1Method for inspecting a specimen and charged particle beam deviceAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2084US6182605B1Apparatus for particle beam induced modification of a specimenADVANTEST CORP·Filed 2000·Granted Feb 6, 2001·20 cites·9 claims
- 2184US5041724AMethod of operating an electron beam measuring deviceINTEGRATED CIRCUIT TESTING·Filed 1989·Granted Aug 20, 1991·29 cites·13 claims
- 2282US10699867B2Simplified particle emitter and method of operating thereofICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Jun 30, 2020·2 cites·19 claims
- 2382US6667478B2Particle beam apparatusADVANTEST CORP·Filed 2002·Granted Dec 23, 2003·17 cites·24 claims
- 2481US9305740B2Charged particle beam system and method of operating thereofFROSIEN JüRGEN·Filed 2013·Granted Apr 5, 2016·5 cites·16 claims
- 2581US5422486AScanning electron beam deviceINTEGRATED CIRCUIT TESTING·Filed 1993·Granted Jun 6, 1995·47 cites·7 claims
- 2679US10504683B2Device and method for forming a plurality of charged particle beamletsICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Dec 10, 2019·2 cites·21 claims
- 2779US9984848B2Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens deviceICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2016·Granted May 29, 2018·2 cites·20 claims
- 2879US9666404B2Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beamICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted May 30, 2017·2 cites·18 claims
- 2978US6720557B2Particle beam apparatusADVANTEST CORP·Filed 2001·Granted Apr 13, 2004·13 cites·20 claims
- 3077US7847266B2Device and method for selecting an emission area of an emission patternINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Dec 7, 2010·4 cites·40 claims
- 3176US6407388B1Corpuscular beam deviceADVANTEST CORP·Filed 2000·Granted Jun 18, 2002·12 cites·11 claims
- 3276US5780859AElectrostatic-magnetic lens arrangementACT ADVANCED CIRCUIT TESTING·Filed 1997·Granted Jul 14, 1998·30 cites·22 claims
- 3376US4164658ACharged-particle beam optical apparatus for imaging a mask on a specimenSIEMENS AG·Filed 1978·Granted Aug 14, 1979·16 cites·2 claims
- 3475US6107633AElectron beam lensADVANTEST CORP·Filed 1998·Granted Aug 22, 2000·27 cites·16 claims
- 3574US6429427B1Method and apparatus for surface imagingADVANTEST CORP·Filed 2000·Granted Aug 6, 2002·10 cites·7 claims
- 3672US7507956B2Charged particle beam energy width reduction system for charged particle beam systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Mar 24, 2009·9 cites·49 claims
- 3772US6509969B1System for inspecting and/or processing a sampleADVANTEST CORP·Filed 2000·Granted Jan 21, 2003·23 cites·7 claims
- 3872US6489621B1Particle beam system with a device for reducing the energy width of a particle beamADVANTEST CORP·Filed 1999·Granted Dec 3, 2002·23 cites·9 claims
- 3972US6104034AObjective lensADVANTEST CORP·Filed 1998·Granted Aug 15, 2000·24 cites·13 claims
- 4071US9202666B1Method for operating a charged particle beam device with adjustable landing energiesINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Dec 1, 2015·2 cites·20 claims
- 4170US8866102B2Electron beam device with tilting and dispersion compensation, and method of operating sameFROSIEN JüRGEN·Filed 2011·Granted Oct 21, 2014·2 cites·21 claims
- 4269US5834773AMethod and apparatus for testing the function of microstructure elementsEBETECH ELECTRON BEAM TECHNOLO·Filed 1996·Granted Nov 10, 1998·32 cites·19 claims
- 4369US4587481AArrangement for testing micro interconnections and a method for operating the sameSIEMENS AG·Filed 1983·Granted May 6, 1986·21 cites·12 claims
- 4468US7638777B2Imaging system with multi source arrayINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Dec 29, 2009·8 cites·22 claims
- 4567US5895919AGun lens for generating a particle beamADVANTEST CORP·Filed 1997·Granted Apr 20, 1999·19 cites·15 claims
- 4666US12362131B2Method for inspecting a specimen and charged particle beam deviceAPPLIED MATERIALS ISRAEL LTD·Filed 2019·Granted Jul 15, 2025·0 cites·26 claims
- 4766US9595417B2High resolution charged particle beam device and method of operating the sameICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2014·Granted Mar 14, 2017·1 cites·16 claims
- 4866US4219719AMethod and apparatus for automatically positioning a workpiece relative to a scanning field or maskSIEMENS AG·Filed 1978·Granted Aug 26, 1980·12 cites·10 claims
- 4965US6232601B1Dynamically compensated objective lens-detection device and methodADVANTEST CORP·Filed 1999·Granted May 15, 2001·18 cites·10 claims
- 5063US7763866B2Charged particle beam device with apertureINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Jul 27, 2010·5 cites·21 claims
Showing the top 50 of 76 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →