Inventor · disambiguated record
Ravi Mullapudi
Also filed as: MULLAPUDI RAVI · MULLAPUDI RAVI B
22 granted patents·8 pending applications·477 citations·filing 1997–2018
96Inventor score
Files withTANGO SYSTEMS INC12MULLAPUDI RAVI5SPRINGWORKS LLC5SYMMORPHIX INC3APPLIED KOMATSU TECHNOLOGY INC2
Top patents by PatentIndex Score
30 records- 0196US7544276B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2005·Granted Jun 9, 2009·22 cites·13 claims
- 0295US7413998B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2005·Granted Aug 19, 2008·17 cites·13 claims
- 0395US6533907B2Method of producing amorphous silicon for hard mask and waveguide applicationsSYMMORPHIX INC·Filed 2001·Granted Mar 18, 2003·91 cites·4 claims
- 0495US6506289B2Planar optical devices and methods for their manufactureSYMMORPHIX INC·Filed 2001·Granted Jan 14, 2003·101 cites·32 claims
- 0594US6827826B2Planar optical devices and methods for their manufactureSYMMORPHIX INC·Filed 2002·Granted Dec 7, 2004·62 cites·5 claims
- 0693US8105466B2Biased pulse DC reactive sputtering of oxide filmsZHANG HONGMEI·Filed 2005·Granted Jan 31, 2012·13 cites·22 claims
- 0790US7378356B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2002·Granted May 27, 2008·30 cites·35 claims
- 0889US7381657B2Biased pulse DC reactive sputtering of oxide filmsSPRINGWORKS LLC·Filed 2004·Granted Jun 3, 2008·26 cites·21 claims
- 0985US7469558B2As-deposited planar optical waveguides with low scattering loss and methods for their manufactureSPRINGWORKS LLC·Filed 2001·Granted Dec 30, 2008·34 cites·12 claims
- 1083US7479210B2Temperature control of pallet in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Jan 20, 2009·12 cites·11 claims
- 1176US7682495B2Oscillating magnet in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Mar 23, 2010·3 cites·21 claims
- 1274US7799190B2Target backing plate for sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Sep 21, 2010·4 cites·4 claims
- 1373US7794574B2Top shield for sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Sep 14, 2010·2 cites·5 claims
- 1471US9932668B2Physical vapor deposition system using backside gas cooling of workpiecesTANGO SYSTEMS INC·Filed 2015·Granted Apr 3, 2018·2 cites·9 claims
- 1567US6257045B1Automated substrate processing systems and methodsAPPLIED KOMATSU TECHNOLOGY INC·Filed 1999·Granted Jul 10, 2001·31 cites·29 claims
- 1665US8092659B2Multi-station sputtering and cleaning systemMULLAPUDI RAVI·Filed 2009·Granted Jan 10, 2012·3 cites·9 claims
- 1761US7744730B2Rotating pallet in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Jun 29, 2010·2 cites·22 claims
- 1859US6205870B1Automated substrate processing systems and methodsAPPLIED KOMATSU TECHNOLOGY INC·Filed 1997·Granted Mar 27, 2001·22 cites·22 claims
- 1957US2010078312A1Sputtering Chamber Having ICP Coil and Targets on Top WallTANGO SYSTEMS INC·Filed 2008·Application pending·0 cites
- 2057US2010080928A1Confining Magnets In Sputtering ChamberTANGO SYSTEMS INC·Filed 2008·Application pending·0 cites
- 2153US10550464B2Physical vapor deposition method using backside gas cooling of workpiecesTANGO SYSTEMS INC·Filed 2018·Granted Feb 4, 2020·0 cites·8 claims
- 2248US7785455B2Cross-contaminant shield in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Aug 31, 2010·0 cites·4 claims
- 2342US2012085638A1Multi-Station Sputtering and Cleaning SystemMULLAPUDI RAVI·Filed 2011·Application pending·0 cites
- 2441US2006231388A1Multi-station sputtering and cleaning systemMULLAPUDI RAVI·Filed 2005·Application pending·0 cites
- 2541US2002046945A1High performance magnetron for DC sputtering systemsAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 2639US9957606B2Physical vapor deposition system using rotating pallet with X and Y positioningTANGO SYSTEMS INC·Filed 2015·Granted May 1, 2018·0 cites·18 claims
- 2738US10053771B2Physical vapor deposition system with target magnets controlled to only be above workpieceTANGO SYSTEMS INC·Filed 2015·Granted Aug 21, 2018·0 cites·11 claims
- 2837US2012024694A1Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Triangular TargetMULLAPUDI RAVI·Filed 2010·Application pending·0 cites
- 2935US2006231389A1Insulated pallet in cleaning chamberMULLAPUDI RAVI·Filed 2005·Application pending·0 cites
- 3034US2003175142A1Rare-earth pre-alloyed PVD targets for dielectric planar applicationsFiled 2002·Application pending·0 cites
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