Assignee
TANGO SYSTEMS INC
US·10 granted patents·3 pending applications·25 citations·filing 2005–2018
Top patents by PatentIndex Score
13 records- 0183US7479210B2Temperature control of pallet in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Jan 20, 2009·12 cites·11 claims
- 0276US7682495B2Oscillating magnet in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Mar 23, 2010·3 cites·21 claims
- 0374US7799190B2Target backing plate for sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Sep 21, 2010·4 cites·4 claims
- 0473US7794574B2Top shield for sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Sep 14, 2010·2 cites·5 claims
- 0571US9932668B2Physical vapor deposition system using backside gas cooling of workpiecesTANGO SYSTEMS INC·Filed 2015·Granted Apr 3, 2018·2 cites·9 claims
- 0661US7744730B2Rotating pallet in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Jun 29, 2010·2 cites·22 claims
- 0757US2010078312A1Sputtering Chamber Having ICP Coil and Targets on Top WallTANGO SYSTEMS INC·Filed 2008·Application pending·0 cites
- 0857US2010080928A1Confining Magnets In Sputtering ChamberTANGO SYSTEMS INC·Filed 2008·Application pending·0 cites
- 0953US10550464B2Physical vapor deposition method using backside gas cooling of workpiecesTANGO SYSTEMS INC·Filed 2018·Granted Feb 4, 2020·0 cites·8 claims
- 1048US7785455B2Cross-contaminant shield in sputtering systemTANGO SYSTEMS INC·Filed 2005·Granted Aug 31, 2010·0 cites·4 claims
- 1144US2016111375A1Temporary bonding of packages to carrier for depositing metal layer for shieldingTANGO SYSTEMS INC·Filed 2014·Application pending·0 cites
- 1239US9957606B2Physical vapor deposition system using rotating pallet with X and Y positioningTANGO SYSTEMS INC·Filed 2015·Granted May 1, 2018·0 cites·18 claims
- 1338US10053771B2Physical vapor deposition system with target magnets controlled to only be above workpieceTANGO SYSTEMS INC·Filed 2015·Granted Aug 21, 2018·0 cites·11 claims
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