Inventor · disambiguated record

Tse-An Yeh

Also filed as: YEH TSE-AN

2 granted patents·0 citations·filing 2021–2022

24Inventor score

Technology areasG03F H10P

Files withENTEGRIS INC2

Top patents by PatentIndex Score

2 records

0164US12078921B2Phase-shift reticle for use in photolithographyENTEGRIS INC·Filed 2021·Granted Sep 3, 2024·0 cites·19 claims
0260US12449728B2High quantum efficiency dry resist for low exposure dose of EUV radiationENTEGRIS INC·Filed 2022·Granted Oct 21, 2025·0 cites·14 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →