Inventor · disambiguated record

Lai Seng Foo

Also filed as: FOO LAI SENG

1 granted patent·7 citations·filing 2005–2005

29Inventor score

Technology areasH10P

Files withTECH SEMICONDUCTOR SINGAPORE1

Top patents by PatentIndex Score

1 record

0171US7248975B2Real time monitoring of particulate contamination in a wafer processing chamberTECH SEMICONDUCTOR SINGAPORE·Filed 2005·Granted Jul 24, 2007·7 cites·16 claims

Join the waitlist — get patent alerts

Get an alert when Lai Seng Foo files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →