Inventor · disambiguated record
Hisatsugu Shirai
Also filed as: SHIRAI HISATSUGU
4 granted patents·31 citations·filing 1989–2005
71Inventor score
Files withFUJITSU LTD4
Top patents by PatentIndex Score
4 records- 0156US5132252AMethod for fabricating semiconductor devices that prevents pattern contaminationFUJITSU LTD·Filed 1989·Granted Jul 21, 1992·17 cites·7 claims
- 0243US7226866B2Etching method for making a reticleFUJITSU LTD·Filed 2004·Granted Jun 5, 2007·1 cites·19 claims
- 0342US5175128AProcess for fabricating an integrated circuit by a repetition of exposure of a semiconductor patternFUJITSU LTD·Filed 1991·Granted Dec 29, 1992·13 cites·9 claims
- 0439US7270920B2Fabrication method of a semiconductor deviceFUJITSU LTD·Filed 2005·Granted Sep 18, 2007·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →