Inventor · disambiguated record
Eugene Fukshansky
Also filed as: FUKSHANSKY EUGENE
3 granted patents·238 citations·filing 1996–2005
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0194US6019848ALid assembly for high temperature processing chamberAPPLIED MATERIALS INC·Filed 1996·Granted Feb 1, 2000·212 cites·13 claims
- 0280US7034563B1Apparatus for measuring of thin dielectric layer properties on semiconductor wafers with contact self aligning electrodesAHBEE 2 L P A CALIFORNIA LTD P·Filed 2005·Granted Apr 25, 2006·16 cites·7 claims
- 0339US6012600APressure responsive clamp for a processing chamberAPPLIED MATERIALS INC·Filed 1996·Granted Jan 11, 2000·10 cites·18 claims
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